Crystalline quality of α-Fe films on Si(111 ) and Ge(111) substrates grown by direct ion beam deposition

1996 ◽  
Vol 281-282 ◽  
pp. 46-51 ◽  
Author(s):  
S. Shimizu ◽  
N. Sasaki
Keyword(s):  
Ion Beam ◽  
Crystalline Quality ◽  
Ion Beam Deposition ◽  
Beam Deposition

scholarly journals Monitoring Carbon in Electron and Ion Beam Deposition within FIB-SEM

Materials ◽  
2021 ◽  
Vol 14 (11) ◽  
pp. 3034
Author(s):  
Nicholas T.H. Farr ◽  
Gareth M. Hughes ◽  
Cornelia Rodenburg
Keyword(s):  
Secondary Electron ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Chemical Surface ◽  
Bonding State ◽  
Ion Beam Deposition ◽  
Electron Microscopes ◽  
Scanning Electron Microscopes ◽  
Beam Deposition

It is well known that carbon present in scanning electron microscopes (SEM), Focused ion beam (FIB) systems and FIB-SEMs, causes imaging artefacts and influences the quality of TEM lamellae or structures fabricated in FIB-SEMs. The severity of such effects depends not only on the quantity of carbon present but also on its bonding state. Despite this, the presence of carbon and its bonding state is not regularly monitored in FIB-SEMs. Here we demonstrated that Secondary Electron Hyperspectral Imaging (SEHI) can be implemented in different FIB-SEMs (ThermoFisher Helios G4-CXe PFIB and Helios Nanolab G3 UC) and used to observe carbon built up/removal and bonding changes resulting from electron/ion beam exposure. As well as the ability to monitor, this study also showed the capability of Plasma FIB Xe exposure to remove carbon contamination from the surface of a Ti6246 alloy without the requirement of chemical surface treatments.

Electron energy loss spectroscopy of diamond-like carbon thin films

1992 ◽  
Vol 50 (2) ◽  
pp. 1272-1273
Author(s):  
J. Kulik ◽  
Y. Lifshitz ◽  
G.D. Lempert ◽  
S. Rotter ◽  
J.W. Rabalais ◽  
...  
Keyword(s):  
Thin Films ◽  
Energy Loss ◽  
Electron Energy ◽  
Ion Beam ◽  
Diamond Like Carbon ◽  
Ion Beam Deposition ◽  
Chemistry Research ◽  
Carbon Thin Films ◽  
Electron Energy Loss ◽  
Beam Deposition

Carbon thin films with diamond-like properties have generated significant interest in condensed matter science in recent years. Their extreme hardness combined with insulating electronic characteristics and high thermal conductivity make them attractive for a variety of uses including abrasion resistant coatings and applications in electronic devices. Understanding the growth and structure of such films is therefore of technological interest as well as a goal of basic physics and chemistry research. Recent investigations have demonstrated the usefulness of energetic ion beam deposition in the preparation of such films. We have begun an electron microscopy investigation into the microstructure and electron energy loss spectra of diamond like carbon thin films prepared by energetic ion beam deposition.The carbon films were deposited using the MEIRA ion beam facility at the Soreq Nuclear Research Center in Yavne, Israel. Mass selected C+ beams in the range 50 to 300 eV were directed onto Si {100} which had been etched with HF prior to deposition.

Improved Crystalline Quality of GaN by Substrate Ion Beam Pretreatment

2002 ◽  
Vol 41 (Part 1, No. 6B) ◽  
pp. 4299-4303 ◽  
Author(s):  
Yong Suk Cho ◽  
Junggeun Jhin ◽  
Eui Kwan Koh ◽  
Young Ju Park ◽  
Eun Kyu Kim ◽  
...  
Keyword(s):  
Ion Beam ◽  
Crystalline Quality

Ion beam deposition of alumina for recording head applications

1995 ◽  
Vol 31 (6) ◽  
pp. 2694-2696 ◽  
Author(s):  
M. Tan ◽  
S.-I. Tan ◽  
Yong Shen
Keyword(s):  
Ion Beam ◽  
Recording Head ◽  
Ion Beam Deposition ◽  
Beam Deposition

Area-selective formation of Si nanocrystals by assisted ion-beam irradiation during dual-ion-beam deposition

2004 ◽  
Vol 85 (9) ◽  
pp. 1595-1597 ◽  
Author(s):  
Jae Kwon Kim ◽  
Kyu Man Cha ◽  
Jung Hyun Kang ◽  
Yong Kim ◽  
Jae-Yel Yi ◽  
...  
Keyword(s):  
Ion Beam ◽  
Beam Irradiation ◽  
Ion Beam Irradiation ◽  
Ion Beam Deposition ◽  
Si Nanocrystals ◽  
Selective Formation ◽  
Beam Deposition

Stress relaxation and optical characterization of TiO2 and SiO2 films grown by dual ion beam deposition

2008 ◽  
Vol 516 (23) ◽  
pp. 8604-8608 ◽  
Author(s):  
C. Bundesmann ◽  
I.-M. Eichentopf ◽  
S. Mändl ◽  
H. Neumann
Keyword(s):  
Stress Relaxation ◽  
Ion Beam ◽  
Optical Characterization ◽  
Sio2 Films ◽  
Ion Beam Deposition ◽  
Beam Deposition

Multilayer growth by low energy ion beam deposition

1999 ◽  
Vol 198-199 ◽  
pp. 731-733 ◽  
Author(s):  
D.E Joyce ◽  
N.D Telling ◽  
J.A Van den Berg ◽  
D.G Lord ◽  
P.J Grundy
Keyword(s):  
Ion Beam ◽  
Low Energy ◽  
Ion Beam Deposition ◽  
Beam Deposition

Grain size of nanocrystalline YSZ buffer layers fabricated by ion beam deposition

2011 ◽  
Vol 471 (21-22) ◽  
pp. 770-773 ◽  
Author(s):  
F. Feng ◽  
K. Shi ◽  
Z. Wang ◽  
B.-J. Yan ◽  
Z.-J. Zhao ◽  
...  
Keyword(s):  
Grain Size ◽  
Ion Beam ◽  
Buffer Layers ◽  
Ion Beam Deposition ◽  
Beam Deposition

Crystal structure of TiNi nanoparticles obtained by Ar ion beam deposition

2008 ◽  
Vol 481-482 ◽  
pp. 476-478 ◽  
Author(s):  
A. Torres Castro ◽  
E. López Cuéllar ◽  
U. Ortiz Méndez ◽  
M. José Yacamán
Keyword(s):  
Crystal Structure ◽  
Ion Beam ◽  
Ion Beam Deposition ◽  
Beam Deposition
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