Auger electron spectroscopy study on interfacial reactions in multilayer thin film systems

Vacuum ◽

10.1016/0042-207x(83)90239-7 ◽

1983 ◽

Vol 33 (6) ◽

pp. 357

Keyword(s):

Thin Film ◽

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Interfacial Reactions ◽

Multilayer Thin Film ◽

Spectroscopy Study

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Auger electron spectroscopy study on interfacial reactions in multilayer thin film systems

Journal of Applied Physics ◽

10.1063/1.331226 ◽

1982 ◽

Vol 53 (6) ◽

pp. 4422-4427 ◽

Author(s):

Kiril A. Pandelišev ◽

Edward Y. Wang

Keyword(s):

Thin Film ◽

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Interfacial Reactions ◽

Multilayer Thin Film ◽

Spectroscopy Study

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An Auger electron spectroscopy/electron energy‐loss spectroscopy study on the oxidation of WSi2 thin film

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.574620 ◽

1987 ◽

Vol 5 (4) ◽

pp. 1456-1458 ◽

Author(s):

Jian‐Wei He ◽

Preben J. Mo/ller ◽

Jiann‐Ruey Chen

Keyword(s):

Thin Film ◽

Energy Loss ◽

Auger Electron Spectroscopy ◽

Electron Energy ◽

Electron Energy Loss Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Spectroscopy Study ◽

Electron Energy Loss

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Ion bombardment induced silicide formation during sputter depth profiling of Ta/Si multilayer thin film structure as studied by x-ray photoelectron spectroscopy and auger electron spectroscopy

Thin Solid Films ◽

10.1016/0040-6090(91)90502-o ◽

1991 ◽

Vol 204 (1) ◽

pp. 163-174 ◽

Author(s):

B.R. Chakraborty ◽

S. Hofmann

Keyword(s):

Thin Film ◽

Auger Electron Spectroscopy ◽

Photoelectron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Depth Profiling ◽

Film Structure ◽

Multilayer Thin Film ◽

Silicide Formation ◽

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An in situ Auger electron spectroscopy study of chromium thin film coverage of copper surfaces: Effects of surface morphology, temperature and environment

Thin Solid Films ◽

10.1016/0040-6090(91)90030-2 ◽

1991 ◽

Vol 200 (1) ◽

pp. 67-76 ◽

Author(s):

H. Lefakis ◽

P.S. Ho

Keyword(s):

Thin Film ◽

Surface Morphology ◽

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Spectroscopy Study ◽

Copper Surfaces

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7404. An Auger electron spectroscopy study of the oxidation and mechanical degradation of Ta thin film protected overlayers at microelectronic solid/ liquid interfaces

Vacuum ◽

10.1016/0042-207x(91)91211-6 ◽

1991 ◽

Vol 42 (8-9) ◽

pp. 594

Keyword(s):

Thin Film ◽

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Mechanical Degradation ◽

Liquid Interfaces ◽

Spectroscopy Study ◽

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Auger electron spectroscopy study of AlxIn1-xN thin film homogeneity

Thin Solid Films ◽

10.1016/0040-6090(85)90349-9 ◽

1985 ◽

Vol 128 (1-2) ◽

pp. L41-L43 ◽

Author(s):

K. Starosta ◽

J. Marsik

Keyword(s):

Thin Film ◽

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Spectroscopy Study

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Auger electron spectroscopy study on the Cr/Al2O3 interfacial reactions

Applied Physics A ◽

10.1007/bf01567881 ◽

1996 ◽

Vol 63 (3) ◽

pp. 277-281

Author(s):

Hua Lu ◽

D. H. Shen ◽

C. L. Bao ◽

Y. D. Cui ◽

J. Qin

Keyword(s):

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Interfacial Reactions ◽

Spectroscopy Study

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An Auger electron spectroscopy study of the oxidation and mechanical degradation of Ta thin film protective overlayers at microelectronic solid/liquid interfaces

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.576624 ◽

1990 ◽

Vol 8 (3) ◽

pp. 3026-3032 ◽

Author(s):

S. Matts Goho

Keyword(s):

Thin Film ◽

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Mechanical Degradation ◽

Liquid Interfaces ◽

Spectroscopy Study ◽

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Auger electron spectroscopy study on the Cr/Al 2 O 3 interfacial reactions

Applied Physics A ◽

10.1007/s003390050384 ◽

1996 ◽

Vol 63 (3) ◽

pp. 277-281

Author(s):

Hua Lu ◽

D. H. Shen ◽

C. L. Bao ◽

Y. D. Cui ◽

J. Qin

Keyword(s):

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Interfacial Reactions ◽

Spectroscopy Study

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Auger electron spectroscopy study of Ni3Si

Scripta Metallurgica ◽

10.1016/0036-9748(89)90492-4 ◽

1989 ◽

Vol 23 (11) ◽

pp. 1969-1973 ◽

Author(s):

I. Baker ◽

R.A. Padgett ◽

E.M. Schulson

Keyword(s):

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Spectroscopy Study

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