7404. An Auger electron spectroscopy study of the oxidation and mechanical degradation of Ta thin film protected overlayers at microelectronic solid/ liquid interfaces

Vacuum ◽  
1991 ◽  
Vol 42 (8-9) ◽  
pp. 594
Keyword(s):  
Thin Film ◽  
Auger Electron Spectroscopy ◽  
Electron Spectroscopy ◽  
Auger Electron ◽  
Mechanical Degradation ◽  
Liquid Interfaces ◽  
Spectroscopy Study ◽  
Solid Liquid

Auger electron spectroscopy study of Ni3Si

1989 ◽  
Vol 23 (11) ◽  
pp. 1969-1973 ◽  
Author(s):  
I. Baker ◽  
R.A. Padgett ◽  
E.M. Schulson
Keyword(s):  
Auger Electron Spectroscopy ◽  
Electron Spectroscopy ◽  
Auger Electron ◽  
Spectroscopy Study

Auger electron spectroscopy study of reactive ion etched silicon carbide

2006 ◽  
Vol 83 (1) ◽  
pp. 12-16 ◽  
Author(s):  
J.H. Xia ◽  
Rusli ◽  
S.F. Choy ◽  
R. Gopalakrishan ◽  
C.C. Tin ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Auger Electron Spectroscopy ◽  
Electron Spectroscopy ◽  
Auger Electron ◽  
Spectroscopy Study ◽  
Etched Silicon
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