Liquid metal alloy ion sources for B, Sb, and Si

Vacuum ◽

10.1016/0042-207x(83)90762-5 ◽

1983 ◽

Vol 33 (7) ◽

pp. 423

Keyword(s):

Liquid Metal ◽

Ion Sources ◽

Metal Alloy ◽

Liquid Metal Alloy

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Temperature dependence of emission spectra of liquid metal alloy ion sources

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(99)01129-5 ◽

2000 ◽

Vol 164-165 ◽

pp. 999-1003 ◽

Author(s):

L. Bischoff ◽

Th. Ganetsos ◽

J. Teichert ◽

G.L.R. Mair

Keyword(s):

Liquid Metal ◽

Temperature Dependence ◽

Emission Spectra ◽

Ion Sources ◽

Metal Alloy ◽

Liquid Metal Alloy

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Temperature dependence of the electric characteristics of liquid metal alloy ion sources

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/33/6/316 ◽

2000 ◽

Vol 33 (6) ◽

pp. 692-695 ◽

Author(s):

L Bischoff ◽

J Teichert ◽

Th Ganetsos ◽

G L R Mair

Keyword(s):

Liquid Metal ◽

Temperature Dependence ◽

Ion Sources ◽

Metal Alloy ◽

Liquid Metal Alloy

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B, Sb and Si Liquid Metal Alloy Ion Sources for Submicron Fabrication

10.7567/ssdm.1981.c-4-4 ◽

1981 ◽

Author(s):

K. Gamo ◽

Y. Inomoto ◽

Y. Ochiai ◽

S. Namba

Keyword(s):

Liquid Metal ◽

Ion Sources ◽

Metal Alloy ◽

Liquid Metal Alloy

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On the temperature dependence of the electric characteristics and mass spectra of liquid metal alloy ion sources

Ultramicroscopy ◽

10.1016/s0304-3991(02)00314-5 ◽

2003 ◽

Vol 95 ◽

pp. 171-181 ◽

Author(s):

Th. Ganetsos ◽

G.L.R. Mair ◽

L. Bischoff

Keyword(s):

Liquid Metal ◽

Temperature Dependence ◽

Mass Spectra ◽

Ion Sources ◽

Metal Alloy ◽

Liquid Metal Alloy

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Boron liquid metal alloy ion sources for special focused ion beam applications

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/6.0000073 ◽

2020 ◽

Vol 38 (4) ◽

pp. 042801 ◽

Author(s):

Lothar Bischoff ◽

Nico Klingner ◽

Paul Mazarov ◽

Wolfgang Pilz ◽

Fabian Meyer

Keyword(s):

Liquid Metal ◽

Focused Ion Beam ◽

Ion Beam ◽

Ion Sources ◽

Metal Alloy ◽

Liquid Metal Alloy

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B, Sb and Si Liquid Metal Alloy Ion Sources for Submicron Fabrication

Japanese Journal of Applied Physics ◽

10.7567/jjaps.21s1.415 ◽

1982 ◽

Vol 21 (S1) ◽

pp. 415 ◽

Author(s):

Kenji Gamo ◽

Yasumasa Inomoto ◽

Yukinori Ochiai ◽

Susumu Namba

Keyword(s):

Liquid Metal ◽

Ion Sources ◽

Metal Alloy ◽

Liquid Metal Alloy

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Effect of temperature on the emission characteristics of liquid metal alloy ion sources

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1340670 ◽

2001 ◽

Vol 19 (1) ◽

pp. 76 ◽

Author(s):

L. Bischoff ◽

J. Teichert ◽

Th. Ganetsos ◽

G. L. R. Mair

Keyword(s):

Liquid Metal ◽

Ion Sources ◽

Metal Alloy ◽

Effect Of Temperature ◽

Emission Characteristics ◽

Liquid Metal Alloy

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Doubly-charged ions from liquid metal alloy ion sources: direct field-evaporation or post-ionization?

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/33/17/102 ◽

2000 ◽

Vol 33 (17) ◽

pp. L86-L89 ◽

Author(s):

G L R Mair ◽

Th Ganetsos ◽

L Bischoff ◽

J Teichert

Keyword(s):

Liquid Metal ◽

Ion Sources ◽

Metal Alloy ◽

Field Evaporation ◽

Doubly Charged Ions ◽

Liquid Metal Alloy ◽

Doubly Charged ◽

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Fundamental properties of erbium-ions-producing liquid metal alloy ion sources

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(02)01490-8 ◽

2002 ◽

Vol 197 (3-4) ◽

pp. 282-287 ◽

Author(s):

L Bischoff ◽

G.L.R Mair ◽

C.J Aidinis ◽

Th Ganetsos

Keyword(s):

Liquid Metal ◽

Ion Sources ◽

Metal Alloy ◽

Fundamental Properties ◽

Erbium Ions ◽

Liquid Metal Alloy

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A study of liquid metal alloy ion sources for the production of ions of interest in the microelectronics industry

Solid-State Electronics ◽

10.1016/s0038-1101(01)00164-2 ◽

2001 ◽

Vol 45 (6) ◽

pp. 1049-1054 ◽

Author(s):

Th. Ganetsos ◽

G.L.R. Mair ◽

L. Bischoff ◽

J. Teichert ◽

D. Kioussis

Keyword(s):

Liquid Metal ◽

Ion Sources ◽

Metal Alloy ◽

Liquid Metal Alloy ◽

Microelectronics Industry

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