B, Sb and Si Liquid Metal Alloy Ion Sources for Submicron Fabrication

1981 ◽  
Author(s):  
K. Gamo ◽  
Y. Inomoto ◽  
Y. Ochiai ◽  
S. Namba
Keyword(s):  
Liquid Metal ◽  
Ion Sources ◽  
Metal Alloy ◽  
Liquid Metal Alloy

Temperature dependence of the electric characteristics of liquid metal alloy ion sources

2000 ◽  
Vol 33 (6) ◽  
pp. 692-695 ◽  
Author(s):  
L Bischoff ◽  
J Teichert ◽  
Th Ganetsos ◽  
G L R Mair
Keyword(s):  
Liquid Metal ◽  
Temperature Dependence ◽  
Ion Sources ◽  
Metal Alloy ◽  
Liquid Metal Alloy

B, Sb and Si Liquid Metal Alloy Ion Sources for Submicron Fabrication

1982 ◽  
Vol 21 (S1) ◽  
pp. 415 ◽  
Author(s):  
Kenji Gamo ◽  
Yasumasa Inomoto ◽  
Yukinori Ochiai ◽  
Susumu Namba
Keyword(s):  
Liquid Metal ◽  
Ion Sources ◽  
Metal Alloy ◽  
Liquid Metal Alloy

A study of liquid metal alloy ion sources for the production of ions of interest in the microelectronics industry

2001 ◽  
Vol 45 (6) ◽  
pp. 1049-1054 ◽  
Author(s):  
Th. Ganetsos ◽  
G.L.R. Mair ◽  
L. Bischoff ◽  
J. Teichert ◽  
D. Kioussis
Keyword(s):  
Liquid Metal ◽  
Ion Sources ◽  
Metal Alloy ◽  
Liquid Metal Alloy ◽  
Microelectronics Industry
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