A new system of TiN coating on interior surface of cylindrical vacuum chamber by hollow cathode discharge method

Multilayered TiN coating was successfully prepared by hollow cathode discharge method. By introduction of the multilayered microstructure, the columnar epitaxial growth of TiN grains was obviously suppressed. The hardness, adhesion performance and wear resistance of the multilayered TiN coating were compared with those of the ordinary TiN coating. The wear resistance of the multilayered TiN coating is much better than that of the ordinary TiN coating. It is due to the multilayered microstructure of the coating that pileups the dislocations and also inhibits the bulk-flaking behavior for the multilayered TiN coating. The morphology analysis of cross section shows that the wear mechanism of the multilayered TiN coating is the micro-area detachment. Moreover, the adhesion of the TiN coating to the substrate is greatly enhanced by the microstructure optimization of the coating.

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Pilot Study of the Analytical Performance of the Pulsed Hollow Cathode Discharge Emission Source

Applied Spectroscopy ◽

10.1366/0003702953964660 ◽

1995 ◽

Vol 49 (7) ◽

pp. 890-899 ◽

Cited By ~ 6

Author(s):

Xiangjun Cai ◽

J. C. Williams

Keyword(s):

Stainless Steel ◽

Electron Microscope ◽

Hollow Cathode ◽

Hollow Cathode Discharge ◽

Analytical Performance ◽

Pulsed Discharge ◽

Stainless Steel Cathode ◽

Steel Cathode ◽

Discharge Method ◽

Scanning Electron

Proper conditioning of the hollow cathode by sputtering is critical to the analytical performance of the hollow cathode. A pulsed discharge procedure was developed to condition the 1.5- × 5-mm stainless steel cathode. A scanning electron microscope was used to study the surface structure resulting from the conditioning. The resulting hollow bottom was bulb-shaped and the surface was mirror-like, very smooth, and shiny. The emission intensities from smooth cathodes were greater that those from the rough ones. The precision obtained here was 3–5% for Na, 5–8% for Li, and 4–10% for K. Three working curves for each element were made on different days with different cathodes that had been conditioned in the same manner for 4 h by sputtering. The three working curves virtually coincided when plotted in the same figure, demonstrating the precision and reproducibility from day to day of the hollow cathode discharge method as developed in this laboratory. The 3-σ detection limits calculated from slopes of working curves are 0.32 pg, 0.35 pg, and 3.2 pg for Na, Li, and K, respectively.

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Magnetic Propeties of TiN-Coated Silicon Steel Sheets by Diagonal-Type High-Current Hollow Cathode Discharge Method.

Shinku ◽

10.3131/jvsj.43.900 ◽

2000 ◽

Vol 43 (9) ◽

pp. 900-904

Author(s):

Yukio INOKUTI ◽

Kazuhiro SUZUKI

Keyword(s):

Hollow Cathode ◽

Silicon Steel ◽

Hollow Cathode Discharge ◽

High Current ◽

Steel Sheets ◽

Discharge Method

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Experimenteller Nachweis des Pendel-Effektes in einer zylindrischen Niederdruck-Hohlkathoden-Entladung in Argon / Experimental Evidence of the Existence of the Pendel Effect1 in a Low Pressure Hollow Cathode Discharge in Argon

Zeitschrift für Naturforschung A ◽

10.1515/zna-1972-1218 ◽

1972 ◽

Vol 27 (12) ◽

pp. 1812-1820 ◽

Cited By ~ 11

Author(s):

H Helm

Keyword(s):

Hollow Cathode ◽

Vacuum Chamber ◽

Cathode Surface ◽

High Vacuum ◽

Hollow Cathode Discharge ◽

Test Region ◽

Small Test ◽

Dark Space ◽

Pass Through ◽

Cylindrical Hollow Cathode

AbstractThe energy of electrons crossing the glow boundary of a cylindrical hollow cathode discharge has been directly controlled in a small, test region by the use of a wall probe installed in the side of the cathode cylinder. Varying the potential of this probe disclosed that some electrons ejected from the probe surface and hence from all cathode walls penetrate into the dark space opposite to the surface of their origin. These electrons can reach the opposite wall if the pressure and the cathode diameter are too low, in which case they will be removed. This removal causes the hollow cathode discharge to extinguish at higher pressures than is the case for linear discharges. Electrons that cross the cathode cavity entirely can pass through a small hole in the cathode wall into a high vacuum chamber and be analysed energetically. The same experiment also discloses the energy distribution of electrons leaving the cathode surface. A comparison with the theory recently published 3 shows that pendelelectrons can be responsible for the currrent amplification observed in the hollow cathode discharge.

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