Formation and characterization of shallow junctions by through-film ion implantation in GaAs
1993 ◽
Vol 80-81
◽
pp. 687-690
◽
1998 ◽
Vol 285
(3-4)
◽
pp. 216-220
◽
2019 ◽
Vol 552
◽
pp. 209-213
◽
1993 ◽
Vol 80-81
◽
pp. 632-635
2013 ◽
Vol 2
(5)
◽
pp. P195-P204
◽