Structure and properties of c-BN film deposited by activated reactive evaporation with a gas activation nozzle

1989 ◽  
Vol 39-40 ◽  
pp. 253-264 ◽  
Author(s):  
K. Inagawa ◽  
K. Watanabe ◽  
K. Saitoh ◽  
Y. Yuchi ◽  
A. Itoh
Keyword(s):  
Structure And Properties ◽  
Reactive Evaporation ◽  
Activated Reactive Evaporation

Deposition of indium nitride films by activated reactive evaporation process – a feasibility study

2005 ◽  
Vol 245 (1-4) ◽  
pp. 73-78 ◽  
Author(s):  
Sheetal J. Patil ◽  
Dhananjay S. Bodas ◽  
A.B. Mandale ◽  
S.A. Gangal
Keyword(s):  
Feasibility Study ◽  
Indium Nitride ◽  
Evaporation Process ◽  
Reactive Evaporation ◽  
Activated Reactive Evaporation

Deposition and characterization of silica-based films by helicon-activated reactive evaporation applied to optical waveguide fabrication

2004 ◽  
Vol 43 (14) ◽  
pp. 2978 ◽  
Author(s):  
Douglas A. P. Bulla ◽  
Wei-Tang Li ◽  
Christine Charles ◽  
Rod Boswell ◽  
Adrian Ankiewicz ◽  
...  
Keyword(s):  
Optical Waveguide ◽  
Reactive Evaporation ◽  
Activated Reactive Evaporation ◽  
Waveguide Fabrication

Study of the hydride forming process of in-situ grown MgH2 thin films by activated reactive evaporation

2008 ◽  
Vol 516 (12) ◽  
pp. 4351-4359 ◽  
Author(s):  
R.J. Westerwaal ◽  
C.P. Broedersz ◽  
R. Gremaud ◽  
M. Slaman ◽  
A. Borgschulte ◽  
...  
Keyword(s):  
Thin Films ◽  
Forming Process ◽  
Reactive Evaporation ◽  
Activated Reactive Evaporation
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