High rate deposition of hafnium nitride by activated reactive evaporation (ARE)

1979 ◽  
Vol 63 (2) ◽  
pp. 327-331 ◽  
Author(s):  
R. Nimmagadda ◽  
R.F. Bunshah
Keyword(s):  
High Rate ◽  
Hafnium Nitride ◽  
Reactive Evaporation ◽  
Activated Reactive Evaporation

Deposition of indium nitride films by activated reactive evaporation process – a feasibility study

2005 ◽  
Vol 245 (1-4) ◽  
pp. 73-78 ◽  
Author(s):  
Sheetal J. Patil ◽  
Dhananjay S. Bodas ◽  
A.B. Mandale ◽  
S.A. Gangal
Keyword(s):  
Feasibility Study ◽  
Indium Nitride ◽  
Evaporation Process ◽  
Reactive Evaporation ◽  
Activated Reactive Evaporation

Deposition and characterization of silica-based films by helicon-activated reactive evaporation applied to optical waveguide fabrication

2004 ◽  
Vol 43 (14) ◽  
pp. 2978 ◽  
Author(s):  
Douglas A. P. Bulla ◽  
Wei-Tang Li ◽  
Christine Charles ◽  
Rod Boswell ◽  
Adrian Ankiewicz ◽  
...  
Keyword(s):  
Optical Waveguide ◽  
Reactive Evaporation ◽  
Activated Reactive Evaporation ◽  
Waveguide Fabrication
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