Deposition and characterization of silica-based films by helicon-activated reactive evaporation applied to optical waveguide fabrication

2004 ◽  
Vol 43 (14) ◽  
pp. 2978 ◽  
Author(s):  
Douglas A. P. Bulla ◽  
Wei-Tang Li ◽  
Christine Charles ◽  
Rod Boswell ◽  
Adrian Ankiewicz ◽  
...  
Keyword(s):  
Optical Waveguide ◽  
Reactive Evaporation ◽  
Activated Reactive Evaporation ◽  
Waveguide Fabrication

Characterization of indium nitride films deposited by activated reactive evaporation process

2003 ◽  
Vol 444 (1-2) ◽  
pp. 52-57 ◽  
Author(s):  
Sheetal J. Patil ◽  
Dhananjay S. Bodas ◽  
A.B. Mandale ◽  
S.A. Gangal
Keyword(s):  
Indium Nitride ◽  
Evaporation Process ◽  
Reactive Evaporation ◽  
Activated Reactive Evaporation

Characterization of TiO2, LiNb3O8, and (Ti0.65Nb0.35)O2compound growth observed during Ti:LiNbO3optical waveguide fabrication

1983 ◽  
Vol 54 (11) ◽  
pp. 6223-6231 ◽  
Author(s):  
M. N. Armenise ◽  
C. Canali ◽  
M. De Sario ◽  
A. Carnera ◽  
P. Mazzoldi ◽  
...  
Keyword(s):  
Waveguide Fabrication

Characterization of $\bf LiNbO_{3}$ Optical-Waveguide Film Grown on Sapphire by ArF Excimer Laser Ablation

1995 ◽  
Vol 34 (Part 1, No. 11) ◽  
pp. 6084-6091 ◽  
Author(s):  
Masamitsu Haruna ◽  
\ast ◽  
Hideki Ishizuki ◽  
Jun Tsutsumi ◽  
Yusaku Shimaoka ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Optical Waveguide ◽  
Excimer Laser ◽  
Excimer Laser Ablation ◽  
Arf Excimer Laser
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