Comparison of atmospheric-pressure helium and argon plasmas generated by capacitively coupled radio-frequency discharge

2006 ◽  
Vol 13 (9) ◽  
pp. 093503 ◽  
Author(s):  
Shou-Zhe Li ◽  
Jin-Pyo Lim ◽  
Jung G. Kang ◽  
Han S. Uhm
Keyword(s):  
Radio Frequency ◽  
Atmospheric Pressure ◽  
Capacitively Coupled ◽  
Argon Plasmas ◽  
Radio Frequency Discharge

scholarly journals Space and phase resolved plasma parameters in an industrial dual-frequency capacitively coupled radio-frequency discharge

2007 ◽  
Vol 40 (22) ◽  
pp. 7008-7018 ◽  
Author(s):  
J Schulze ◽  
T Gans ◽  
D O'Connell ◽  
U Czarnetzki ◽  
A R Ellingboe ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Dual Frequency ◽  
Plasma Parameters ◽  
Capacitively Coupled ◽  
Radio Frequency Discharge

Hydro-carbon material design in a capacitively coupled radio-frequency discharge

2017 ◽  
Vol 15 (3) ◽  
pp. 1700152 ◽  
Author(s):  
Slobodan Mitic ◽  
Stéphane Coussan ◽  
Céline Martin ◽  
Lénaïc Couëdel
Keyword(s):  
Radio Frequency ◽  
Carbon Material ◽  
Material Design ◽  
Capacitively Coupled ◽  
Hydro Carbon ◽  
Radio Frequency Discharge

scholarly journals Atmospheric-Pressure Radio-Frequency Discharge for Degradation of Vinyl Chloride With $\hbox{Pt}/\hbox{Al}_{2}\hbox{O}_{3}$ Catalyst

2011 ◽  
Vol 39 (4) ◽  
pp. 1092-1098 ◽  
Author(s):  
Min-Hao Yuan ◽  
Yu-Ying Lin ◽  
Ching-Yuan Chang ◽  
Cha-Chi Chang ◽  
Je-Lueng Shie ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Vinyl Chloride ◽  
Atmospheric Pressure ◽  
Radio Frequency Discharge

Diffuseα-mode atmospheric pressure radio-frequency discharge in neon

2014 ◽  
Vol 23 (4) ◽  
pp. 042001 ◽  
Author(s):  
Z Navrátil ◽  
L Dosoudilová ◽  
R Josepson ◽  
P Dvořák ◽  
D Trunec
Keyword(s):  
Radio Frequency ◽  
Atmospheric Pressure ◽  
Radio Frequency Discharge

Detection of particles of less than 5 nm in diameter formed in an argon–silane capacitively coupled radio-frequency discharge

2001 ◽  
Vol 79 (26) ◽  
pp. 4301-4303 ◽  
Author(s):  
L. Boufendi ◽  
J. Gaudin ◽  
S. Huet ◽  
G. Viera ◽  
M. Dudemaine
Keyword(s):  
Radio Frequency ◽  
Capacitively Coupled ◽  
Radio Frequency Discharge

Sheath motion in a capacitively coupled radio frequency discharge

1991 ◽  
Vol 19 (4) ◽  
pp. 619-627 ◽  
Author(s):  
B.P. Wood ◽  
M.A. Lieberman ◽  
A.J. Lichtenberg
Keyword(s):  
Radio Frequency ◽  
Capacitively Coupled ◽  
Radio Frequency Discharge
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