Synthesis of β-SiC thin films for high temperature sensors by the activated reactive evaporation process

1993 ◽  
Vol 163 (2) ◽  
pp. 207-210 ◽  
Author(s):  
Y.H.C. Cha ◽  
S. Jou ◽  
S. Prakash ◽  
H.J. Doerr ◽  
R.F. Bunshah
Keyword(s):  
Thin Films ◽  
High Temperature ◽  
Temperature Sensors ◽  
Evaporation Process ◽  
Reactive Evaporation ◽  
Activated Reactive Evaporation

Deposition of indium nitride films by activated reactive evaporation process – a feasibility study

2005 ◽  
Vol 245 (1-4) ◽  
pp. 73-78 ◽  
Author(s):  
Sheetal J. Patil ◽  
Dhananjay S. Bodas ◽  
A.B. Mandale ◽  
S.A. Gangal
Keyword(s):  
Feasibility Study ◽  
Indium Nitride ◽  
Evaporation Process ◽  
Reactive Evaporation ◽  
Activated Reactive Evaporation

Study of the hydride forming process of in-situ grown MgH2 thin films by activated reactive evaporation

2008 ◽  
Vol 516 (12) ◽  
pp. 4351-4359 ◽  
Author(s):  
R.J. Westerwaal ◽  
C.P. Broedersz ◽  
R. Gremaud ◽  
M. Slaman ◽  
A. Borgschulte ◽  
...  
Keyword(s):  
Thin Films ◽  
Forming Process ◽  
Reactive Evaporation ◽  
Activated Reactive Evaporation
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