Effects of activated reactive evaporation process parameters on the microhardness of polycrystalline silicon carbide thin films

Thin Solid Films ◽

10.1016/0040-6090(94)90322-0 ◽

1994 ◽

Vol 253 (1-2) ◽

pp. 212-217 ◽

Author(s):

YongHwa Chris Cha ◽

Guho Kim ◽

Hans J. Doerr ◽

Rointan F. Bunshah

Keyword(s):

Silicon Carbide ◽

Process Parameters ◽

Polycrystalline Silicon ◽

Evaporation Process ◽

Reactive Evaporation ◽

Polycrystalline Silicon Carbide ◽

Activated Reactive Evaporation

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Application of polycrystalline silicon carbide thin films as the passivating contacts for silicon solar cells

Solar Energy Materials and Solar Cells ◽

10.1016/j.solmat.2019.110329 ◽

2020 ◽

Vol 206 ◽

pp. 110329 ◽

Author(s):

Zhiyu Xu ◽

Ke Tao ◽

Shuai Jiang ◽

Rui Jia ◽

Wei Li ◽

...

Keyword(s):

Silicon Carbide ◽

Solar Cells ◽

Polycrystalline Silicon ◽

Silicon Solar Cells ◽

Polycrystalline Silicon Carbide

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Synthesis of β-SiC thin films for high temperature sensors by the activated reactive evaporation process

Materials Science and Engineering A ◽

10.1016/0921-5093(93)90791-c ◽

1993 ◽

Vol 163 (2) ◽

pp. 207-210 ◽

Author(s):

Y.H.C. Cha ◽

S. Jou ◽

S. Prakash ◽

H.J. Doerr ◽

R.F. Bunshah

Keyword(s):

High Temperature ◽

Temperature Sensors ◽

Evaporation Process ◽

Reactive Evaporation ◽

Activated Reactive Evaporation

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Synthesis of Polycrystalline Silicon Carbide (SiC) Thin Films Using Pulsed Laser Deposition

ZnO Nanocrystals and Allied Materials - Springer Series in Materials Science ◽

10.1007/978-81-322-1160-0_10 ◽

2013 ◽

pp. 217-232 ◽

Author(s):

B. Venkataramesh ◽

Nilesh J. Vasa

Keyword(s):

Silicon Carbide ◽

Pulsed Laser Deposition ◽

Polycrystalline Silicon ◽

Pulsed Laser ◽

Laser Deposition ◽

Polycrystalline Silicon Carbide

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Fracture toughness of polycrystalline silicon carbide thin films

Applied Physics Letters ◽

10.1063/1.1864246 ◽

2005 ◽

Vol 86 (7) ◽

pp. 071920 ◽

Author(s):

J. J. Bellante ◽

H. Kahn ◽

R. Ballarini ◽

C. A. Zorman ◽

M. Mehregany ◽

...

Keyword(s):

Fracture Toughness ◽

Silicon Carbide ◽

Polycrystalline Silicon ◽

Polycrystalline Silicon Carbide

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Fracture toughness of low-pressure chemical-vapor-deposited polycrystalline silicon carbide thin films

Journal of Applied Physics ◽

10.1063/1.2158135 ◽

2006 ◽

Vol 99 (1) ◽

pp. 013517 ◽

Author(s):

V. Hatty ◽

H. Kahn ◽

J. Trevino ◽

C. A. Zorman ◽

M. Mehregany ◽

...

Keyword(s):

Fracture Toughness ◽

Silicon Carbide ◽

Polycrystalline Silicon ◽

Chemical Vapor ◽

Low Pressure ◽

Chemical Vapor Deposited ◽

Polycrystalline Silicon Carbide ◽

Pressure Chemical

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Electrical properties of polycrystalline β-SiC thin films for high temperature sensors grown by the activated reactive evaporation process

Surface and Coatings Technology ◽

10.1016/0257-8972(93)90322-f ◽

1993 ◽

Vol 62 (1-3) ◽

pp. 697-701 ◽

Author(s):

Y.H.C. Cha ◽

H.J. Doerr ◽

R.F. Bunshah

Keyword(s):

High Temperature ◽

Electrical Properties ◽

Temperature Sensors ◽

Evaporation Process ◽

Reactive Evaporation ◽

Activated Reactive Evaporation

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Characterization of Thermoelectric Properties of Heavily Doped n-Type Polycrystalline Silicon Carbide Thin Films

IEEE Transactions on Electron Devices ◽

10.1109/ted.2012.2228867 ◽

2013 ◽

Vol 60 (1) ◽

pp. 513-517 ◽

Author(s):

Man I Lei ◽

Mehran Mehregany

Keyword(s):

Silicon Carbide ◽

Thermoelectric Properties ◽

Polycrystalline Silicon ◽

Polycrystalline Silicon Carbide ◽

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Improvement of process parameters for polycrystalline silicon carbide low pressure chemical vapor deposition on 150mm silicon substrate using monomethylsilane as precursor

Thin Solid Films ◽

10.1016/j.tsf.2013.03.053 ◽

2013 ◽

Vol 536 ◽

pp. 94-98 ◽

Author(s):

A. Ajayakumar ◽

S. Maruthoor ◽

T. Fuchs ◽

F. Rohlfing ◽

O. Jakovlev ◽

...

Keyword(s):

Silicon Carbide ◽

Chemical Vapor Deposition ◽

Process Parameters ◽

Vapor Deposition ◽

Silicon Substrate ◽

Polycrystalline Silicon ◽

Chemical Vapor ◽

Low Pressure ◽

Polycrystalline Silicon Carbide ◽

Pressure Chemical

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Synthesis of β-SiC thin films for high temperature sensors by the activated reactive evaporation process

Materials Science and Engineering ◽

10.1016/0025-5416(93)90014-w ◽

1993 ◽

Vol 163 (2) ◽

pp. 207-210 ◽

Author(s):

Y Cha

Keyword(s):

High Temperature ◽

Temperature Sensors ◽

Evaporation Process ◽

Reactive Evaporation ◽

Activated Reactive Evaporation

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Nanoindentation of polycrystalline silicon-carbide thin films studied by acoustic emission

Applied Physics Letters ◽

10.1063/1.1784880 ◽

2004 ◽

Vol 85 (10) ◽

pp. 1695-1697 ◽

Author(s):

X.-G. Ma ◽

K. Komvopoulos ◽

D. B. Bogy

Keyword(s):

Silicon Carbide ◽

Acoustic Emission ◽

Polycrystalline Silicon ◽

Polycrystalline Silicon Carbide

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