Preparation and characterization of an optically-detectable hydrogen gas sensor consisting of Pd/WO3 thin films

1993 ◽  
Vol 14 (1-3) ◽  
pp. 547-548 ◽  
Author(s):  
Yong-su Oh ◽  
Junichi Hamagami ◽  
Yuichi Watanabe ◽  
Masasuke Takata
Keyword(s):  
Thin Films ◽  
Gas Sensor ◽  
Hydrogen Gas ◽  
Wo3 Thin Films

Characterization of photochemically grown Pd loaded WO3 thin films and its evaluation as ammonia gas sensor

2020 ◽  
Vol 825 ◽  
pp. 154166 ◽  
Author(s):  
C. Castillo ◽  
G. Cabello ◽  
B. Chornik ◽  
Y. Huentupil ◽  
G.E. Buono-Core
Keyword(s):  
Thin Films ◽  
Gas Sensor ◽  
Ammonia Gas ◽  
Wo3 Thin Films

Structural and optical characterization of WO3 thin films for gas sensor applications

2005 ◽  
Vol 97 (9) ◽  
pp. 093527 ◽  
Author(s):  
E. György ◽  
G. Socol ◽  
I. N. Mihailescu ◽  
C. Ducu ◽  
S. Ciuca
Keyword(s):  
Thin Films ◽  
Gas Sensor ◽  
Optical Characterization ◽  
Sensor Applications ◽  
Wo3 Thin Films

scholarly journals Tungsten Oxide Based Hydrogen Gas Sensor Prepared by Advanced Magnetron Sputtering

2021 ◽  
Vol 6 (1) ◽  
pp. 5
Author(s):  
Nirmal Kumar ◽  
Stanislav Haviar ◽  
Jiří Rezek ◽  
Jiří Čapek ◽  
Pavel Baroch
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Tungsten Oxide ◽  
Gas Sensor ◽  
Rf Sputtering ◽  
Hydrogen Gas ◽  
Deposition Parameters ◽  
Copper Tungstate ◽  
The Individual ◽  
Wo3 Thin Films

In this study, we demonstrate the advantages of two advanced sputtering techniques for the preparation of a thin-film conductometric gas sensor. We combined tungsten oxide (WO3) thin films with other materials to achieve enhanced sensorial behavior towards hydrogen. Thin films of WO3 were prepared using the DC and HiPIMS technique, which allowed us to tune the phase composition and crystallinity of the oxide by changing the deposition parameters. The second material was then added on-top of these films. We used the copper tungstate CuWO4 in the form of nano-islands deposited by reactive rf sputtering and Pd particles formed during conventional dc sputtering. The specimens were tested for their response to a time-varied hydrogen concentration in synthetic air at various temperatures. The sensitivity and response time were evaluated. The performance of the individual films is presented as well as the details of the synthesis. Advanced magnetron techniques (such as HiPIMS) allowed us to tune the property of the film to improve its sensorial behavior. The method is compatible with the silicon electronics industry and consists of a few steps that do not require any wet technique, and the films can be used in an as-deposited state. Therefore, sensorial nanostructured materials prepared using magnetron sputtering are very suitable for use in miniaturized electronic devices.

MOCVD growth and characterization of TiO2 thin films for hydrogen gas sensor application

2019 ◽  
Vol 6 (7) ◽  
pp. 076313 ◽  
Author(s):  
Pepen Arifin ◽  
M Arief Mustajab ◽  
Suprijadi Haryono ◽  
D R Adhika ◽  
A A Nugraha
Keyword(s):  
Thin Films ◽  
Gas Sensor ◽  
Hydrogen Gas ◽  
Tio2 Thin Films ◽  
Sensor Application ◽  
Mocvd Growth

Characterization of sol-gel prepared WO3 thin films as a gas sensor

1999 ◽  
Vol 17 (4) ◽  
pp. 1873-1879 ◽  
Author(s):  
C. Cantalini ◽  
M. Z. Atashbar ◽  
Y. Li ◽  
M. K. Ghantasala ◽  
S. Santucci ◽  
...  
Keyword(s):  
Thin Films ◽  
Gas Sensor ◽  
Sol Gel ◽  
Wo3 Thin Films

scholarly journals Sensing mechanism of an optimized room temperature optical hydrogen gas sensor made of zinc oxide thin films

2020 ◽  
Vol 9 (5) ◽  
pp. 10624-10634
Author(s):  
Siti Nor Aliffah Mustaffa ◽  
Nurul Assikin Ariffin ◽  
Ahmed Lateef Khalaf ◽  
Mohd. Hanif Yaacob ◽  
Nizam Tamchek ◽  
...  
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Gas Sensor ◽  
Room Temperature ◽  
Hydrogen Gas ◽  
Oxide Thin Films ◽  
Sensing Mechanism

ELECTROCHROMIC CHARACTERIZATION OF ELECTRODEPOSITED WO3 THIN FILMS

2002 ◽  
Author(s):  
R. VIJAYALAKSHMI ◽  
M. JAYACHANDRAN ◽  
C. SANJEEVIRAJA
Keyword(s):  
Thin Films ◽  
Wo3 Thin Films

Growth and crystallographic characterization of molecular beam epitaxial WO3 and MoO3/WO3 thin films on sapphire substrates

2016 ◽  
Vol 381 ◽  
pp. 32-35 ◽  
Author(s):  
Mitsuaki Yano ◽  
Kazuto Koike ◽  
Masayuki Matsuo ◽  
Takayuki Murayama ◽  
Yoshiyuki Harada ◽  
...  
Keyword(s):  
Thin Films ◽  
Molecular Beam ◽  
Molecular Beam Epitaxial ◽  
Sapphire Substrates ◽  
Wo3 Thin Films

Characterization of WO3 thin films prepared by picosecond laser deposition for gas sensing

2017 ◽  
Vol 248 ◽  
pp. 153-159 ◽  
Author(s):  
Elisabeth M. Preiß ◽  
Andreas Krauß ◽  
Ville Kekkonen ◽  
Nicolae Barsan ◽  
Helmut Seidel
Keyword(s):  
Thin Films ◽  
Gas Sensing ◽  
Picosecond Laser ◽  
Laser Deposition ◽  
Wo3 Thin Films
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