Heterogeneous Chemical Kinetics by Modulated Molecular Beam Mass Spectrometry

1977 ◽  
pp. 181-195
Author(s):  
DONALD R. OLANDER
Keyword(s):  
Mass Spectrometry ◽  
Chemical Kinetics ◽  
Molecular Beam ◽  
Molecular Beam Mass Spectrometry ◽  
Heterogeneous Chemical

Gas Phase and Surface Reactions of Organometallic Arsenic Sources

1989 ◽  
Vol 145 ◽  
Author(s):  
T.R. Omstead ◽  
S. Brandon ◽  
M. Hoveland ◽  
K.F. Jensen ◽  
D.A. Bohling ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Growth Rate ◽  
Gas Phase ◽  
Chemical Kinetics ◽  
Molecular Beam ◽  
Surface Reactions ◽  
Molecular Beam Mass Spectrometry ◽  
The Common ◽  
Kinetics Of

AbstractThe chemical kinetics of two new organometallic arsenic substitutes, tris-trifluoromethylarsenic (As(CF3)3) and phenylarsine (PhAsH2), for use in the MOCVD of GaAs have been characterized through the use of microbalance gravimetry and molecular beam mass spectrometry. Both growth rate and gas-phase cracking studies demonstrate that phenylarsine interacts only slightly with the common gallium precursors, which may make it a useful alternative to arsine. Growth with tris-trifluoromethylarsenic is achieved only at low V/III ratios and with pressures above 250 Torr. The compound etches GaAs under most conditions.

Using Molecular-Beam Mass Spectrometry to Study the Pecvd of Diamondlike Carbon Films

1993 ◽  
Vol 334 ◽  
Author(s):  
I.B. Graff ◽  
R.A. Pugliese ◽  
P.R. Westmoreland
Keyword(s):  
Mass Spectrometry ◽  
Vapor Deposition ◽  
Molecular Beam ◽  
Film Growth ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Total Flow ◽  
Measured Concentration ◽  
Molecular Beam Mass Spectrometry ◽  
Diamondlike Carbon

AbstractMolecular-beam mass spectrometry has been used to study plasma-enhanced chemical vapor deposition (PECVD) of diamondlike carbon films. A threshold-ionization technique was used to identify and quantify species in the plasma. Mole fractions of H, H2, CH4, C2H2, C2H6 and Ar were measured in an 83.3% CH4/Ar mixture at a pressure of 0.1 torr and a total flow of 30 sccm. Comparisons were made between mole fractions measured at plasma powers of 25W and 50W. These results were compared to measured concentration profiles and to film growth rates.

Flame structure study of a lean H2/N2O/Ar Flame employing molecular beam mass spectrometry and modeling

1994 ◽  
Vol 99 (2) ◽  
pp. 323-330 ◽  
Author(s):  
David C. Dayton ◽  
Cynthia M. Faust ◽  
William R. Anderson ◽  
Rosario C. Sausa
Keyword(s):  
Mass Spectrometry ◽  
Molecular Beam ◽  
Flame Structure ◽  
Structure Study ◽  
Molecular Beam Mass Spectrometry
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