ABSTRACTAnodic oxide formation and chemical and electrochemical etching of n-Si(111) have been investigated in alkaline media. Due to the complexity of the processes, the investigation has been restricted to the initial phase where a transitory anodic photocurrent peak is observed slightly positive from the open circuit potential (ocp). In-system photoelectron spectroscopy, performed at the U 49/2 beamline at Bessy, shows sub-monolayer silicon surface oxidation and remnant H-termination, indicating island-type oxide formation. Scanning probe microscopy shows the formation of macropores with 300-500 nm diameter and an average depth of 5-8 nm. The discussion comprises chemical and electrochemical dissolution mechanisms and routes to development of nanoemitter fuel generating devices.
The study of metal-oxide sol-gel nanocomposites using scanning probe microscopy and X-ray photoelectron spectroscopy