Nonlinearity in mass spectrometry for quantitative multi-component gas analysis in reaction processes

2021 ◽  
pp. 339412
Author(s):  
Rongbin Li ◽  
Hongde Xia ◽  
Qian Huang ◽  
Peter Hedström ◽  
Wangzhong Mu ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Gas Analysis ◽  
Reaction Processes

scholarly journals Thermogravimetry-evolved gas analysis-mass spectrometry system for materials research

2003 ◽  
Vol 26 (4) ◽  
pp. 449-460 ◽  
Author(s):  
M Kamruddin ◽  
P K Ajikumar ◽  
S Dash ◽  
A K Tyagi ◽  
Baldev Raj
Keyword(s):  
Mass Spectrometry ◽  
Evolved Gas Analysis ◽  
Gas Analysis ◽  
Evolved Gas ◽  
Materials Research ◽  
Mass Spectrometry System

Control of the Process Gas in Plasma Conditions

2003 ◽  
pp. 139-151
Keyword(s):  
Mass Spectrometry ◽  
Plasma Nitriding ◽  
Gas Analysis ◽  
Control Analysis ◽  
Ion Nitriding ◽  
Zone Formation ◽  
Process Gas ◽  
Gas Control ◽  
Kinetics Of

Abstract Process gas control for plasma (ion) nitriding is a matter of estimating the flows necessary to accomplish the required surface metallurgy. This chapter reviews several studies aimed at better understanding process gas control in plasma nitriding and its influence on compound zone formation. Emphasis is placed on the effect of sputtering on the kinetics of compound zone formation. The discussion covers the processes involved in process gas control analysis by photo spectrometry and mass spectrometry and the difficulties associated with gas analysis.

Sign in / Sign up

Export Citation Format

Share Document