Investigations on opto-electronical properties of DC reactive magnetron sputtered zinc aluminum oxide thin films annealed at different temperatures

2013 ◽  
Vol 265 ◽  
pp. 169-175 ◽  
Author(s):  
B. Rajesh Kumar ◽  
T. Subba Rao
Keyword(s):  
Thin Films ◽  
Aluminum Oxide ◽  
Reactive Magnetron ◽  
Oxide Thin Films ◽  
Different Temperatures ◽  
Zinc Aluminum Oxide

Surface roughness of aluminum oxide thin films deposited by DC and RF reactive magnetron sputtering

2018 ◽  
Vol 5 (7) ◽  
pp. 15228-15232 ◽  
Author(s):  
Chatpawee Hom-on ◽  
Mati Horprathum ◽  
Pitak Eiamchai ◽  
Sakson Limwichean ◽  
Viyapol Patthanasettakul ◽  
...  
Keyword(s):  
Thin Films ◽  
Surface Roughness ◽  
Magnetron Sputtering ◽  
Aluminum Oxide ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Oxide Thin Films
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