Surface roughness of aluminum oxide thin films deposited by DC and RF reactive magnetron sputtering

2018 ◽  
Vol 5 (7) ◽  
pp. 15228-15232 ◽  
Author(s):  
Chatpawee Hom-on ◽  
Mati Horprathum ◽  
Pitak Eiamchai ◽  
Sakson Limwichean ◽  
Viyapol Patthanasettakul ◽  
...  
Keyword(s):  
Thin Films ◽  
Surface Roughness ◽  
Magnetron Sputtering ◽  
Aluminum Oxide ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Oxide Thin Films

Structure and optical parameters of Eu doped tellurium oxide thin films prepared by reactive magnetron sputtering method

2019 ◽  
Vol 691 ◽  
pp. 137592 ◽  
Author(s):  
Marcin Łapiński ◽  
Michalina Walas ◽  
Anna Gapska ◽  
Dorota Kulik ◽  
Aneta Szmytke ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Optical Parameters ◽  
Reactive Magnetron ◽  
Oxide Thin Films ◽  
Tellurium Oxide
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