Structural and electrical properties of sputtering power and gas pressure on Ti-dope In2O3 transparent conductive films by RF magnetron sputtering

Applied Surface Science ◽

10.1016/j.apsusc.2012.12.133 ◽

2013 ◽

Vol 275 ◽

pp. 227-232 ◽

Author(s):

Accarat Chaoumead ◽

Bong-Hyun Joo ◽

Dong-Joo Kwak ◽

Youl-Moon Sung

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Gas Pressure ◽

Transparent Conductive Films ◽

Conductive Films ◽

Sputtering Power ◽

Structural And Electrical Properties

Download Full-text

Optical and Electrical Properties of AZO/Ag/AZO Transparent Conductive Films Prepared by RF Magnetron Sputtering Using Powder Targets

Chinese Journal of Luminescence ◽

10.3788/fgxb20153612.1427 ◽

2015 ◽

Vol 36 (12) ◽

pp. 1427-1433

Author(s):

刘思宁 LIU Si-ning ◽

周艳文 ZHOU Yan-wen ◽

吴川 WU Chuan ◽

吴法宇 WU Fa-yu

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Optical And Electrical Properties ◽

Transparent Conductive Films ◽

Conductive Films

Download Full-text

Growth and characterization of group-II-alloyed ZnAlO UV-range transparent conductive films prepared by RF magnetron sputtering

Vacuum ◽

10.1016/j.vacuum.2013.03.013 ◽

2013 ◽

Vol 97 ◽

pp. 15-19 ◽

Author(s):

Jang Ho Park ◽

Hoang Ba Cuong ◽

Sang Hun Jeong ◽

Byung Teak Lee

Keyword(s):

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Transparent Conductive Films ◽

Conductive Films ◽

Group Ii ◽

Download Full-text

Effect of annealing on structural and electrical properties of the Li–Mn–O thin films, prepared by high frequency RF magnetron sputtering

Journal of Physics and Chemistry of Solids ◽

10.1016/j.jpcs.2011.07.018 ◽

2011 ◽

Vol 72 (11) ◽

pp. 1251-1255 ◽

Author(s):

Rajive M. Tomy ◽

K.M. Anil Kumar ◽

P.B. Anand ◽

S. Jayalekshmi

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

High Frequency ◽

Rf Magnetron Sputtering ◽

Structural And Electrical Properties

Download Full-text

Structural and electrical properties of Li-doped p-type ZnO thin films fabricated by RF magnetron sputtering

Materials Science and Engineering B ◽

10.1016/j.mseb.2010.12.018 ◽

2011 ◽

Vol 176 (7) ◽

pp. 548-551 ◽

Author(s):

Lidan Tang ◽

Bing Wang ◽

Yue Zhang ◽

Yousong Gu

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Zno Thin Films ◽

Structural And Electrical Properties ◽

Download Full-text

The effect of sputtering Ar gas pressure on optical and electrical properties of flexible ECD device with WO3 electrode deposited by RF magnetron sputtering on ITO/PET substrate

Optical Materials ◽

10.1016/j.optmat.2021.111829 ◽

2021 ◽

pp. 111829

Author(s):

Pattarapon Pooyodying ◽

Young-Ho Son ◽

Youl-Moon Sung ◽

Jung-Woo Ok

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Gas Pressure ◽

Optical And Electrical Properties ◽

Ar Gas ◽

Download Full-text

Effect of target materials on structural and electrical properties of unhydrogenated amorphous silicon thin films deposited by RF magnetron sputtering

2008 33rd IEEE Photovolatic Specialists Conference ◽

10.1109/pvsc.2008.4922813 ◽

2008 ◽

Author(s):

S. Paul ◽

S. Chatterjee ◽

Yiqiang Chen ◽

P. Dutta ◽

V. Bommisetty ◽

...

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Amorphous Silicon ◽

Rf Magnetron Sputtering ◽

Silicon Thin Films ◽

Structural And Electrical Properties

Download Full-text

Structural and electrical properties of AlN films deposited using reactive RF magnetron sputtering for solar concentrator application

Applied Surface Science ◽

10.1016/j.apsusc.2011.11.095 ◽

2012 ◽

Vol 258 (8) ◽

pp. 3450-3454 ◽

Author(s):

A. Kale ◽

R.S. Brusa ◽

A. Miotello

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Solar Concentrator ◽

Structural And Electrical Properties ◽

Reactive Rf Magnetron Sputtering

Download Full-text

Comparative study of group-II alloying effects on physical property of ZnGaO transparent conductive films prepared by RF magnetron sputtering

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2015.05.080 ◽

2015 ◽

Vol 645 ◽

pp. 322-327 ◽

Author(s):

Che-sin Lee ◽

Hoang Ba Cuong ◽

Sang-Hun Jeong ◽

Byung-Teak Lee

Keyword(s):

Magnetron Sputtering ◽

Comparative Study ◽

Physical Property ◽

Rf Magnetron Sputtering ◽

Transparent Conductive Films ◽

Conductive Films ◽

Group Ii ◽

Alloying Effects

Download Full-text

Structural and electrical properties of AlN layers grown on silicon by reactive RF magnetron sputtering

10.1063/1.4954356 ◽

2016 ◽

Author(s):

N. Bazlov ◽

N. Pilipenko ◽

O. Vyvenko ◽

I. Kotina ◽

Yu. Petrov ◽

...

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Structural And Electrical Properties ◽

Reactive Rf Magnetron Sputtering

Download Full-text

Structural and Electrical Properties of Cu(In,Ga)Se2Thin Films Prepared by RF Magnetron Sputtering without Selenization

Journal of the Korean institute of surface engineering ◽

10.5695/jkise.2013.46.2.075 ◽

2013 ◽

Vol 46 (2) ◽

pp. 75-79

Author(s):

Jung-Kyu Choi ◽

Dong-Hyun Hwang ◽

Young-Guk Son

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Structural And Electrical Properties

Download Full-text