Growth and characterization of group-II-alloyed ZnAlO UV-range transparent conductive films prepared by RF magnetron sputtering

Vacuum ◽  
2013 ◽  
Vol 97 ◽  
pp. 15-19 ◽  
Author(s):  
Jang Ho Park ◽  
Hoang Ba Cuong ◽  
Sang Hun Jeong ◽  
Byung Teak Lee
Keyword(s):  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Transparent Conductive Films ◽  
Conductive Films ◽  
Group Ii ◽  
Uv Range

Study on inverse spinel zinc stannate, Zn2SnO4, as transparent conductive films deposited by rf magnetron sputtering

2009 ◽  
Vol 518 (4) ◽  
pp. 1304-1308 ◽  
Author(s):  
Yasushi Sato ◽  
Jun Kiyohara ◽  
Akira Hasegawa ◽  
Takeshi Hattori ◽  
Masaya Ishida ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Inverse Spinel ◽  
Zinc Stannate ◽  
Transparent Conductive Films ◽  
Conductive Films

Growth and characterization of device quality ZnO on Si(111) and c-sapphire using a conventional rf magnetron sputtering

2006 ◽  
Vol 17 (2-4) ◽  
pp. 305-310 ◽  
Author(s):  
Byung-Teak Lee ◽  
Sang-Hun Jeong ◽  
Myong-Ho Kim ◽  
Min-Ho Kuk ◽  
Dong-Sik Bae ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering

SUPERCONDUCTING PROPERTIES OF BSCCO (2223) ULTRATHIN FILMS

2002 ◽  
Vol 09 (05n06) ◽  
pp. 1757-1760
Author(s):  
L. NAVARRETE ◽  
A. MARIÑO ◽  
H. SÁNCHEZ
Keyword(s):  
Electrical Properties ◽  
Magnetron Sputtering ◽  
Structural Characterization ◽  
Ultrathin Films ◽  
Rf Magnetron Sputtering ◽  
Ex Situ ◽  
Thermal Treatments ◽  
Superconducting Properties

Ultrathin films of (Bi–Pb)–Sr–Ca–Cu–O (2223) were produced by ex situ RF magnetron sputtering on MgO (100) substrates. Films with different thermal treatments and thickness varying between 30 nm and 300 nm were obtained and studied systematically. A structural characterization of these samples was carried out and correlated with their electrical properties and thickness.

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