Effect of substrate temperature on transparent conducting Al and F co-doped ZnO thin films prepared by rf magnetron sputtering

2016 ◽  
Vol 370 ◽  
pp. 83-91 ◽  
Author(s):  
Fang-Hsing Wang ◽  
Chiao-Lu Chang
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Substrate Temperature ◽  
Rf Magnetron Sputtering ◽  
Zno Thin Films ◽  
Transparent Conducting ◽  
Doped Zno ◽  
Co Doped

Characteristics of Quaternary Flexible Mg and Ga Co-Doped ZnO Thin Films Fabricated Using RF Magnetron Sputtering

2016 ◽  
Vol 8 (3) ◽  
pp. 610-617 ◽  
Author(s):  
In Young Kim ◽  
K. V. Gurav ◽  
Seung Wook Shin ◽  
Ki Seok Jeon ◽  
P. S. Patil ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Zno Thin Films ◽  
Doped Zno ◽  
Co Doped

Substrate Temperature Dependence of Transparent Conducting Al-Doped ZnO Thin Films Prepared by Magnetron Sputtering

1992 ◽  
Vol 31 (Part 2, No. 3A) ◽  
pp. L257-L260 ◽  
Author(s):  
Tadatsugu Minami ◽  
Hirotoshi Sato ◽  
Hideyuki Imamoto ◽  
Shinzo Takata
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Substrate Temperature ◽  
Temperature Dependence ◽  
Zno Thin Films ◽  
Transparent Conducting ◽  
Doped Zno
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