Effect of Ar ion-beam-assistance and substrate temperature on physical properties of Al-doped ZnO thin films deposited by RF magnetron sputtering
2017 ◽
Vol 95
◽
pp. 451-458
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Keyword(s):
Ion Beam
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2019 ◽
Vol 30
(10)
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pp. 9910-9915
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2020 ◽
Vol 112
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pp. 105016
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2019 ◽
Vol 23
(12)
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pp. 3217-3224
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2016 ◽
Vol 42
(13)
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pp. 14456-14462
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2016 ◽
Vol 307
◽
pp. 1129-1133
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2009 ◽
Vol 282
(2)
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pp. 247-252
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Keyword(s):
2021 ◽
Keyword(s):