The effects of substrate temperature on properties of B and Ga co-doped ZnO thin films grown by RF magnetron sputtering

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2016.03.004 ◽

2016 ◽

Vol 307 ◽

pp. 1129-1133 ◽

Author(s):

Lei Zhang ◽

Jian Huang ◽

Jin Yang ◽

Ke Tang ◽

Bing Ren ◽

...

Keyword(s):

Magnetron Sputtering ◽

Substrate Temperature ◽

Rf Magnetron Sputtering ◽

Zno Thin Films ◽

Doped Zno ◽

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Effect of substrate temperature on transparent conducting Al and F co-doped ZnO thin films prepared by rf magnetron sputtering

Applied Surface Science ◽

10.1016/j.apsusc.2016.02.161 ◽

2016 ◽

Vol 370 ◽

pp. 83-91 ◽

Author(s):

Fang-Hsing Wang ◽

Chiao-Lu Chang

Keyword(s):

Magnetron Sputtering ◽

Substrate Temperature ◽

Rf Magnetron Sputtering ◽

Zno Thin Films ◽

Transparent Conducting ◽

Doped Zno ◽

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Study on the structural, electrical and optical properties of Al-F co-doped ZnO thin films prepared by RF magnetron sputtering

Optoelectronics Letters ◽

10.1007/s11801-011-9266-0 ◽

2011 ◽

Vol 7 (1) ◽

pp. 45-48 ◽

Author(s):

Rui-xin Ma ◽

Mu-kong Wang ◽

Bo Kang ◽

Yong-gang Wang

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Zno Thin Films ◽

Electrical And Optical Properties ◽

Doped Zno ◽

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Characteristics of Quaternary Flexible Mg and Ga Co-Doped ZnO Thin Films Fabricated Using RF Magnetron Sputtering

Science of Advanced Materials ◽

10.1166/sam.2016.2515 ◽

2016 ◽

Vol 8 (3) ◽

pp. 610-617 ◽

Author(s):

In Young Kim ◽

K. V. Gurav ◽

Seung Wook Shin ◽

Ki Seok Jeon ◽

P. S. Patil ◽

...

Keyword(s):

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Zno Thin Films ◽

Doped Zno ◽

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Structure and magnetic properties of Mn-Fe co-doped ZnO thin films deposited by RF-magnetron sputtering

10.1063/1.5028889 ◽

2018 ◽

Author(s):

V. Malapati ◽

K. K. Venkataratnam ◽

R. Singh

Keyword(s):

Magnetic Properties ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Zno Thin Films ◽

Doped Zno ◽

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Li and Al co-doped ZnO Thin Films Grown by RF Magnetron Sputtering

ECS Meeting Abstracts ◽

10.1149/ma2008-01/22/783 ◽

2008 ◽

Keyword(s):

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Zno Thin Films ◽

Doped Zno ◽

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Investigation of physical properties of F-and-Ga co-doped ZnO thin films grown by RF magnetron sputtering for perovskite solar cells applications

Materials Science in Semiconductor Processing ◽

10.1016/j.mssp.2020.105016 ◽

2020 ◽

Vol 112 ◽

pp. 105016 ◽

Author(s):

Guoxi Zheng ◽

Jianmin Song ◽

Jie Zhang ◽

Junjie Li ◽

Bing Han ◽

...

Keyword(s):

Solar Cells ◽

Magnetron Sputtering ◽

Physical Properties ◽

Perovskite Solar Cells ◽

Rf Magnetron Sputtering ◽

Zno Thin Films ◽

Doped Zno ◽

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Effect of Ar ion-beam-assistance and substrate temperature on physical properties of Al-doped ZnO thin films deposited by RF magnetron sputtering

Materials Research Bulletin ◽

10.1016/j.materresbull.2017.07.034 ◽

2017 ◽

Vol 95 ◽

pp. 451-458 ◽

Author(s):

Adem Sreedhar ◽

Jin Hyuk Kwon ◽

Jonghoon Yi ◽

Jin Seog Gwag

Keyword(s):

Magnetron Sputtering ◽

Substrate Temperature ◽

Physical Properties ◽

Ion Beam ◽

Rf Magnetron Sputtering ◽

Zno Thin Films ◽

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Effects of substrate temperature on the structural, morphological, electrical and optical properties of Al and Ga co-doped ZnO thin films grown by DC magnetron sputtering

Materials Letters ◽

10.1016/j.matlet.2015.01.130 ◽

2015 ◽

Vol 145 ◽

pp. 279-282 ◽

Author(s):

Ke Zhu ◽

Ye Yang ◽

Weijie Song

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Substrate Temperature ◽

Zno Thin Films ◽

Dc Magnetron Sputtering ◽

Electrical And Optical Properties ◽

Doped Zno ◽

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Effect of substrate temperature on the structural and optical properties of ZnO and Al-doped ZnO thin films prepared by dc magnetron sputtering

Optics Communications ◽

10.1016/j.optcom.2008.10.003 ◽

2009 ◽

Vol 282 (2) ◽

pp. 247-252 ◽

Author(s):

Xue-Yong Li ◽

Hong-Jian Li ◽

Zhi-Jun Wang ◽

Hui Xia ◽

Zhi-Yong Xiong ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Substrate Temperature ◽

Zno Thin Films ◽

Dc Magnetron Sputtering ◽

Structural And Optical Properties ◽

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Room-temperature RF magnetron sputtering deposition of hydrogenated Ga-doped ZnO thin films on PET substrates for PDLC devices

Applied Physics A ◽

10.1007/s00339-018-2276-z ◽

2018 ◽

Vol 124 (12) ◽

Author(s):

Chaoting Zhu ◽

Tianqi Zhou ◽

Feng Shi ◽

Weijie Song ◽

Jia Li ◽

...

Keyword(s):

Magnetron Sputtering ◽

Room Temperature ◽

Rf Magnetron Sputtering ◽

Zno Thin Films ◽

Sputtering Deposition ◽

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