Effect of long-term stability of the aluminium nitride - silicon interface for microwave-frequency electronic devices

2021 ◽  
Vol 551 ◽  
pp. 149461
Author(s):  
Holger Fiedler ◽  
Jérôme Leveneur ◽  
Mitchell Nancarrow ◽  
David R.G. Mitchell ◽  
John Kennedy
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