Nanoindentation-induced deformation behaviors of tetrahedral amorphous carbon film deposited by cathodic vacuum arc with different substrate bias voltages

2021 ◽  
pp. 151741
Author(s):  
Lijun Wang ◽  
Yan Liu ◽  
Hui Chen Data analysis ◽  
Mengchao Wang
Keyword(s):  
Amorphous Carbon ◽  
Carbon Film ◽  
Vacuum Arc ◽  
Substrate Bias ◽  
Amorphous Carbon Film ◽  
Tetrahedral Amorphous Carbon ◽  
Deformation Behaviors

Growth of tetrahedral amorphous carbon film: Tight-binding molecular dynamics study

Carbon ◽  
2005 ◽  
Vol 43 (9) ◽  
pp. 1976-1983 ◽  
Author(s):  
B. Zheng ◽  
W.T. Zheng ◽  
S.S. Yu ◽  
H.W. Tian ◽  
F.L. Meng ◽  
...  
Keyword(s):  
Molecular Dynamics ◽  
Amorphous Carbon ◽  
Carbon Film ◽  
Tight Binding ◽  
Amorphous Carbon Film ◽  
Tetrahedral Amorphous Carbon
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