Characterization of Tetrahedral Amorphous Carbon Film with Various Thickness by High Through-put Method
Modification of tetrahedral amorphous carbon film by concurrent Ar ion bombardment during deposition
1998 ◽
Vol 105
(1-2)
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pp. 91-96
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1999 ◽
Vol 120-121
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pp. 579-584
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2005 ◽
Vol 244
(1-4)
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pp. 111-114
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2018 ◽
Vol 6
(3)
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pp. 036414
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