Focused-ion-beam assisted fabrication of individual multiwall carbon nanotube field emitter

A technique was investigated for the fabrication of triode-type carbon nanotube (CNT) field emitter arrays, where an integrated extraction gate was built between the nanotube cathode and the anode. The gate improves the control capability of emission currents. To fabricate the metal-gated CNT field emitter arrays, well ordered cells were generated by focused ion beam (FIB) milling of platinum ( Pt ) coated silicon ( Si ) substrate and then modified by chemical etching. Two types of catalyst elements iron ( Fe ) and nickel ( Ni ), were used for growing the CNTs inside the cells. The methods for depositing catalysts into the cells include spin coating sol–gel Fe , FIB induced decomposition of ferrocene and sputter coating pure Ni . CNT growth was carried out by a chemical vapor deposition (CVD) process. The results suggest that the CNTs grew from inside the cells where the catalysts were located. In comparison, the CNTs synthesized from the sol–gel Fe catalyst were straighter than those from ferrocene Fe and pure Ni . The density and orientation of the CNTs in each cell are directly related to the type and quantity of the catalysts and are also affected by the size of the cells.

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Focused Ion Beam Fabrication of Individual Carbon Nanotube Devices

MRS Proceedings ◽

10.1557/proc-1020-gg08-01 ◽

2007 ◽

Vol 1020 ◽

Author(s):

Lee Chow ◽

Guangyu Chai

Keyword(s):

Carbon Nanotubes ◽

Carbon Nanotube ◽

Atomic Force Microscope ◽

Focused Ion Beam ◽

Ion Beam ◽

Side Wall ◽

Multiwall Carbon Nanotube ◽

Atomic Force ◽

Electron Field ◽

Carbon Nanotube Devices

AbstractFocused ion beam (FIB) techniques have found many applications in nanoscience and nanotechnology applications in recent years. However, not much work has been done using FIB to fabricate carbon nanotube devices. This is mainly due to the fact that carbon nanotubes are very fragile and energetic ion beam from FIB can easily damage the carbon nanotubes. Here we report the fabrication of carbon nanotube (CNT) devices, including electron field emitters, atomic force microscope tips, and nano-pores for biomedical applications. This is made possible by a unique, coaxial configuration consisting of a CNT embedded in a graphitic carbon coating, which was developed by us for FIB processing of carbon nanotubes. The CNT-based atomic force microscope tip has been demonstrated. The electron field emission from the tip and the side wall of CNT will be discussed. We will also report the fabrication of a multiwall carbon nanotube nanopore for future applications.

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Ball-Shaped Multiwall Carbon Nanotube Tip by Ion-Beam-Induced Deposition of Platinum

Microscopy and Microanalysis ◽

10.1017/s1431927613002213 ◽

2013 ◽

Vol 19 (S2) ◽

pp. 44-45

Author(s):

C. Han ◽

Y.H. Kahng ◽

I.-Y. Park ◽

B.C. Park ◽

S.J. Ahn

Keyword(s):

Carbon Nanotube ◽

Ion Beam ◽

Multiwall Carbon Nanotube ◽

Multiwall Carbon

Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

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All-Fiber Pyro- and Piezo-electric Nanogenerator for IoT Based Self-Powered Health-Care Monitoring

Materials Advances ◽

10.1039/d1ma00131k ◽

2021 ◽

Author(s):

Biswajit Mahanty ◽

Sujoy Kumar Ghosh ◽

Kuntal Maity ◽

KRITTISH ROY ◽

Subrata Sarkar ◽

...

Keyword(s):

Health Care ◽

Carbon Nanotube ◽

Vinylidene Fluoride ◽

Electrospun Nanofibers ◽

Multiwall Carbon Nanotube ◽

Poly Vinylidene Fluoride ◽

Self Powered ◽

Health Care Monitoring ◽

Multiwall Carbon ◽

Piezo Electric

In this work, an all-fiber pyro- and piezo-electric nanogenerator (PPNG) is designed by multiwall carbon nanotube (MWCNT) doped poly(vinylidene fluoride) (PVDF) electrospun nanofibers as the active layer and interlocked conducting...

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