scholarly journals Focused Ion Beam Fabrication of Individual Carbon Nanotube Devices

2007 ◽  
Vol 1020 ◽  
Author(s):  
Lee Chow ◽  
Guangyu Chai
Keyword(s):  
Carbon Nanotubes ◽  
Carbon Nanotube ◽  
Atomic Force Microscope ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Side Wall ◽  
Multiwall Carbon Nanotube ◽  
Atomic Force ◽  
Electron Field ◽  
Carbon Nanotube Devices

AbstractFocused ion beam (FIB) techniques have found many applications in nanoscience and nanotechnology applications in recent years. However, not much work has been done using FIB to fabricate carbon nanotube devices. This is mainly due to the fact that carbon nanotubes are very fragile and energetic ion beam from FIB can easily damage the carbon nanotubes. Here we report the fabrication of carbon nanotube (CNT) devices, including electron field emitters, atomic force microscope tips, and nano-pores for biomedical applications. This is made possible by a unique, coaxial configuration consisting of a CNT embedded in a graphitic carbon coating, which was developed by us for FIB processing of carbon nanotubes. The CNT-based atomic force microscope tip has been demonstrated. The electron field emission from the tip and the side wall of CNT will be discussed. We will also report the fabrication of a multiwall carbon nanotube nanopore for future applications.

Advancement in fabrication of carbon nanotube tip for atomic force microscope using multi-axis nanomanipulator in scanning electron microscope

2022 ◽  
Author(s):  
Sanjeev Kumar Kanth ◽  
Anjli Sharma ◽  
Byong Chon Park ◽  
Woon Song ◽  
Hyun Rhu ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Microscope ◽  
Carbon Nanotube ◽  
Scanning Electron Microscope ◽  
Atomic Force Microscope ◽  
Structural Integrity ◽  
Ion Beam ◽  
Rectilinear Motion ◽  
Atomic Force ◽  
Scanning Electron

Abstract We have constructed a new nanomanipulator (NM) in a field emission scanning electron microscope (FE-SEM) to fabricate carbon nanotube (CNT) tip to precisely adjust the length and attachment angle of CNT onto the mother atomic force microscope (AFM) tip. The new NM is composed of 2 modules, each of which has the degree of freedom of three-dimensional rectilinear motion x, y and z and one-dimensional rotational motion θ. The NM is mounted on the stage of a FE-SEM. With the system of 14 axes in total which includes 5 axes of FE-SEM and 9 axes of nano-actuators, it was possible to see CNT tip from both rear and side view about the mother tip. With the help of new NM, the attachment angle error could be reduced down to 0º as seen from both the side and the rear view, as well as, the length of the CNT could be adjusted with the precision using electron beam induced etching. For the proper attachment of CNT on the mother tip surface, the side of the mother tip was milled with focused ion beam. In addition, electron beam induced deposition was used to strengthen the adhesion between CNT and the mother tip. In order to check the structural integrity of fabricated CNT, transmission electron microscope image was taken which showed the fine cutting of CNT and the clean surface as well. Finally, the performance of the fabricated CNT tip was demonstrated by imaging 1-D grating and DNA samples with atomic force microscope in tapping mode.

Focused-ion-beam assisted fabrication of individual multiwall carbon nanotube field emitter

Carbon ◽  
2005 ◽  
Vol 43 (10) ◽  
pp. 2083-2087 ◽  
Author(s):  
Guangyu Chai ◽  
Lee Chow ◽  
Dan Zhou ◽  
Sitarum R. Byahut
Keyword(s):  
Carbon Nanotube ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Multiwall Carbon Nanotube ◽  
Field Emitter ◽  
Multiwall Carbon

FIB-assisted Pt Deposition for Carbon Nanotube Integration and 3-D Nanoengineering

2002 ◽  
Vol 739 ◽  
Author(s):  
K. Dovidenko ◽  
J. Rullan ◽  
R. Moore ◽  
K. A. Dunn ◽  
R. E. Geer ◽  
...  
Keyword(s):  
Carbon Nanotubes ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Contact Lines ◽  
Force Microscopy ◽  
Atomic Force ◽  
Transmission Electron ◽  
Minimal Damage ◽  
Effective Use ◽  
Non Destructive

ABSTRACTIn this study, the Focused Ion Beam (FIB) instrument has been used for carbon nanotubes integration and nanoegineering studies. Results of thorough investigation (electrical, structural and chemical) of ultra-thin Pt contact lines and pads fabricated by the FIB, along with evaluation of nanomodification of the carbon nanotubes under the Ga+ ion beam and during Pt deposition are presented. The initial stages of FIB-assisted Pt deposition on multi-wall nanotubes are studied by transmission electron microscopy (TEM). The FIB parameters are optimized to provide non-destructive imaging and controllable Pt deposition with minimal damage on the nanotubes. We have demonstrated effective use of FIB-fabricated Pt pads as means of attaching the nanotubes to the substrate for atomic force and ultrasonic force microscopy studies.

scholarly journals Investigating pore-forming peptides using the atomic force microscope

2019 ◽  
Author(s):  
◽  
Anna Elizabeth Pittman
Keyword(s):  
Atomic Force Microscope ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Temporal Stability ◽  
Force Spectroscopy ◽  
Hydrodynamic Drag ◽  
Gold Coating ◽  
Cross Sectional ◽  
Lipid Interactions ◽  
Atomic Force

In my projects, I used the Atomic Force Microscope (AFM) to image the effects of pore-forming peptides and I used the Focused Ion Beam (FIB) to modify AFM cantilevers to increase the precision of force spectroscopy measurements. ... Another way to investigate peptide-lipid interactions is to perform force spectroscopy experiments using the AFM. In order to lower drift and increase force precision, I used a FIB to modify commercially available AFM cantilevers. By reducing the cross sectional area of the cantilever, the hydrodynamic drag was reduced, thus increasing the force precision. Removing most of the gold coating on the cantilever increased the temporal stability. These modified cantilevers have already been put to use in the lab to measure peptide-lipid interactions.

scholarly journals Fabrication of probe tips via the FIB method for nanodiagnostics of the surface of solids by atomic force microscopy

2021 ◽  
Vol 2086 (1) ◽  
pp. 012204
Author(s):  
D J Rodriguez ◽  
A V Kotosonova ◽  
H A Ballouk ◽  
N A Shandyba ◽  
O I Osotova ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Atomic Force Microscope ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Contact Mode ◽  
Ion Etching ◽  
Force Microscopy ◽  
Atomic Force

Abstract In this work, we carried out an investigation of commercial atomic force microscope (AFM) probes for contact and semi-contact modes, which were modified by focused ion beam (FIB). This method was used to modify the original tip shape of silicon AFM probes, by ion-etching and ion-enhance gas deposition. we show a better performance of the FIB-modified probes in contrast with the non-modified commercial probes. These results were obtained after using both probes in semi-contact mode in a calibration grating sample.

Fabrication of Coaxial and Triaxial Atomic Force Microscope Imaging Probes

2014 ◽  
Vol 1712 ◽  
Author(s):  
Keith A. Brown ◽  
Robert M. Westervelt
Keyword(s):  
Atomic Force Microscope ◽  
Physical Vapor Deposition ◽  
Focused Ion Beam ◽  
Imaging Techniques ◽  
Ion Beam ◽  
Atomic Force ◽  
Imaging Probes ◽  
Microscope Imaging ◽  
Afm Probe ◽  
General Method

ABSTRACTHerein, we detail the fabrication of atomic force microscope (AFM) probes that have two and three coaxial electrodes at their tips. This fabrication strategy leverages the availability of conductive AFM probes and encompasses a general method for processing their complex and delicate structure through the deposition of insulating and conductive layers by shadow masked chemical and physical vapor deposition, respectively. Focused ion beam milling is used to expose the two electrode (coaxial) or three electrode (triaxial) structures at the tip of the AFM probe. Finally, we discuss new imaging modalities enabled by these probes including electrically-driven contact resonance imaging for nanoscale mechanical characterization, imaging the local dielectric constant by quantifying the dielectrophoretic force, and trapping functional particles at the tip of a probe using dielectrophoresis. These imaging techniques illustrate the generality and utility of this fabrication approach and suggest that such probes could be widely applied to image many nanoscale materials.

Structural Modification of Carbon Nanotube Tip Using Focused Ion Beam

2006 ◽  
Author(s):  
C. S. Han ◽  
Y. H. Yoon ◽  
Y. H. Shin ◽  
J. W. Song
Keyword(s):  
Carbon Nanotube ◽  
Structural Modification ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Ion Beam Irradiation ◽  
Free Standing ◽  
Vertical Angle ◽  
Force Microscopy ◽  
Atomic Force ◽  
High Resolution Images

We report the structural modification of carbon nanotube (CNT) tip for Atomic force microscopy (SPM) based on ion beam irradiation. In general, CNT tip assembled by dielectrophoresis would often have non-vertical angle, very crooked shape or too lengthy one. Therefore, these tips should be modified to the appropriate shape to use as an AFM tip. We found that the ion beam could contribute to merge the bundled CNTs, to make the CNT diameter uniform as well as to make the wavy shape of CNT straight. In addition, we could cut the free-standing CNT on a Si tip using focused ion beam (FIB). From the atomic force microscope (AFM) measurement of 15 nm gold particles and DNA molecules, we showed that the CNT tip modified by FIB produced high resolution images as well as little wear by comparing with those of a conventional silicon tip

Fabrication of Carbon Nanotube Probes in Atomic Force Microscopy

2009 ◽  
Vol 76-78 ◽  
pp. 497-501 ◽  
Author(s):  
Zong Wei Xu ◽  
Feng Zhou Fang ◽  
Xiao Tang Hu
Keyword(s):  
Atomic Force Microscopy ◽  
Electron Beam ◽  
Carbon Nanotube ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Milling Process ◽  
Deposition Method ◽  
Bonding Force ◽  
Force Microscopy ◽  
Atomic Force

Carbon nanotube (CNT) probe used in atomic force microscopy (AFM) was fabricated by using electron beam induced Pt deposition method. The bonding force for CNT probe was found to be larger than 500nN. The nanotube probe’s length was shortened by focused ion beam milling process. It is confirmed that the CNT probe shows higher aspect ratio than the Si probe. The nanotube probes with fullerene-like cap end present higher imaging resolution than those with open end.

scholarly journals An atomic force microscope integrated with a helium ion microscope for correlative nanoscale characterization

2020 ◽  
Vol 11 ◽  
pp. 1272-1279
Author(s):  
Santiago H Andany ◽  
Gregor Hlawacek ◽  
Stefan Hummel ◽  
Charlène Brillard ◽  
Mustafa Kangül ◽  
...  
Keyword(s):  
Atomic Force Microscope ◽  
Focused Ion Beam ◽  
Environmental Changes ◽  
Ion Beam ◽  
Nanomechanical Property ◽  
Nanoscale Structures ◽  
Atomic Force ◽  
Helium Ion ◽  
Nanoscale Characterization ◽  
Versatile Tool

In this work, we report on the integration of an atomic force microscope (AFM) into a helium ion microscope (HIM). The HIM is a powerful instrument, capable of imaging and machining of nanoscale structures with sub-nanometer resolution, while the AFM is a well-established versatile tool for multiparametric nanoscale characterization. Combining the two techniques opens the way for unprecedented in situ correlative analysis at the nanoscale. Nanomachining and analysis can be performed without contamination of the sample and environmental changes between processing steps. The practicality of the resulting tool lies in the complementarity of the two techniques. The AFM offers not only true 3D topography maps, something the HIM can only provide in an indirect way, but also allows for nanomechanical property mapping, as well as for electrical and magnetic characterization of the sample after focused ion beam materials modification with the HIM. The experimental setup is described and evaluated through a series of correlative experiments, demonstrating the feasibility of the integration.

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