Effect of the Ti-target arc current on the properties of Ti-doped ZnO thin films prepared by dual-target cathodic arc plasma deposition

2016 ◽  
Vol 42 (13) ◽  
pp. 14438-14442 ◽  
Author(s):  
Shuo-Fu Hsu ◽  
Min-Hang Weng ◽  
Jyh-Horng Chou ◽  
Chun-Hsiung Fang ◽  
Ru-Yuan Yang
Keyword(s):  
Thin Films ◽  
Plasma Deposition ◽  
Zno Thin Films ◽  
Arc Plasma ◽  
Arc Current ◽  
Doped Zno ◽  
Cathodic Arc ◽  
Dual Target

Deposition of superhard TiAlSiN thin films by cathodic arc plasma deposition

2005 ◽  
Vol 200 (5-6) ◽  
pp. 1391-1394 ◽  
Author(s):  
S.K. Kim ◽  
P.V. Vinh ◽  
J.H. Kim ◽  
T. Ngoc
Keyword(s):  
Thin Films ◽  
Plasma Deposition ◽  
Arc Plasma ◽  
Cathodic Arc

Oxidation of TiAlCrSiN Thin Films at 1000°C in Air

2015 ◽  
Vol 719-720 ◽  
pp. 127-131
Author(s):  
Min Jung Kim ◽  
Dong Bok Lee
Keyword(s):  
Thin Films ◽  
Oxide Scale ◽  
Oxidation Resistance ◽  
Plasma Deposition ◽  
Arc Plasma ◽  
Cathodic Arc

TiAlCrSiN thin films consisting of alternating TiCrN and AlSiN nanolayers were deposited by cathodic arc plasma deposition, and oxidized at 1000°C in air. When oxidized for 10 h, about 1 μm-thick oxide sale formed, and its surface was covered with numerous tiny oxide crystallites. When oxidized for 30 h, about 2.5 μm-thick oxide scale formed, and began to spall from the surface. When oxidized for 80 h, the oxide sale was about 12.2 μm-thick. The film had a reasonable oxidation resistance due mainly to Al, Cr, and Si, which formed protective oxides.

Deposition of superhard nanolayered TiCrAlSiN thin films by cathodic arc plasma deposition

2008 ◽  
Vol 202 (22-23) ◽  
pp. 5395-5399 ◽  
Author(s):  
Sun Kyu Kim ◽  
Pham Van Vinh ◽  
Jae Wook Lee
Keyword(s):  
Thin Films ◽  
Plasma Deposition ◽  
Arc Plasma ◽  
Cathodic Arc

Characterization of Cr-doped TiO2 thin films prepared by cathodic arc plasma deposition

2007 ◽  
Vol 202 (4-7) ◽  
pp. 962-966 ◽  
Author(s):  
Mu-Hsuan Chan ◽  
Wei-Yu Ho ◽  
Da-Yung Wang ◽  
Fu-Hsing Lu
Keyword(s):  
Thin Films ◽  
Plasma Deposition ◽  
Arc Plasma ◽  
Tio2 Thin Films ◽  
Doped Tio2 ◽  
Cathodic Arc
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