Phase-gradient atomic layer deposition of TiO2 thin films by plasma-induced local crystallization

2021 ◽  
Author(s):  
Dohyun Go ◽  
Jaehyeong Lee ◽  
Jeong Woo Shin ◽  
Sungje Lee ◽  
Wangu Kang ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Tio2 Thin Films ◽  
Phase Gradient ◽  
Layer Deposition

scholarly journals Quantifying the Extent of Ligand Incorporation and the Effect on Properties of TiO2 Thin Films Grown by Atomic Layer Deposition Using an Alkoxide or an Alkylamide

2020 ◽  
Vol 32 (4) ◽  
pp. 1393-1407
Author(s):  
Maxime E. Dufond ◽  
Maïmouna W. Diouf ◽  
Clémence Badie ◽  
Carine Laffon ◽  
Philippe Parent ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Tio2 Thin Films ◽  
Layer Deposition

Selection of post-growth treatment parameters for atomic layer deposition of structurally disordered TiO2 thin films

2008 ◽  
Vol 354 (2-9) ◽  
pp. 404-408 ◽  
Author(s):  
S. Dueñas ◽  
H. Castán ◽  
H. García ◽  
L. Bailón ◽  
K. Kukli ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Tio2 Thin Films ◽  
Layer Deposition ◽  
Selection Of

Atomic Layer Deposition, Characterization, and Growth Mechanistic Studies of TiO2 Thin Films

Langmuir ◽  
2014 ◽  
Vol 30 (25) ◽  
pp. 7395-7404 ◽  
Author(s):  
Mikko Kaipio ◽  
Timothee Blanquart ◽  
Yoann Tomczak ◽  
Jaakko Niinistö ◽  
Marco Gavagnin ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Mechanistic Studies ◽  
Tio2 Thin Films ◽  
Layer Deposition

Young modulus and Poisson ratio measurements of TiO2 thin films deposited with Atomic Layer Deposition

2012 ◽  
Vol 206 (8-9) ◽  
pp. 2459-2463 ◽  
Author(s):  
L. Borgese ◽  
M. Gelfi ◽  
E. Bontempi ◽  
P. Goudeau ◽  
G. Geandier ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Poisson Ratio ◽  
Young Modulus ◽  
Atomic Layer ◽  
Tio2 Thin Films ◽  
Layer Deposition
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