scholarly journals Detection of the delayed condensation effect and determination of its impact on the accuracy of gas adsorption pore size distributions

Author(s):  
Sean P. Rigby ◽  
Muayad Hasan ◽  
Iain Hitchcock ◽  
Robin S. Fletcher
2001 ◽  
Vol 714 ◽  
Author(s):  
Kazuhiko Omote ◽  
Shigeru Kawamura

ABSTRACTWe have successively developed a new x-ray scattering technique for a non-destructive determination of pore-size distributions in porous low-κ thin films formed on thick substrates. The pore size distribution in a film is derived from x-ray diffuse scattering data, which are measured using offset θ/2θ scans to avoid strong specular reflections from the film surface and its substrate. Γ-distribution mode for the pores in the film is used in the calculation. The average diameter and the dispersion parameter of the Γ-distribution function are varied and refined by computer so that the calculated scattering pattern best matches to the experimental pattern. The technique has been used to analyze porous methyl silsesquioxane (MSQ) films. The pore size distributions determined by the x-ray scattering technique agree with that of the commonly used gas adsorption technique. The x-ray technique has been also used successfully determine small pores less than one nanometer in diameter, which is well below the lowest limit of the gas adsorption technique.


Carbon ◽  
2020 ◽  
Vol 166 ◽  
pp. 414-426
Author(s):  
Quang K. Loi ◽  
Luisa Prasetyo ◽  
Johnathan (Shiliang) Tan ◽  
D.D. Do ◽  
D. Nicholson

2002 ◽  
Vol 206 (1-3) ◽  
pp. 393-400 ◽  
Author(s):  
R.H López ◽  
A.M Vidales ◽  
G Zgrablich ◽  
F Rojas ◽  
I Kornhauser ◽  
...  

2003 ◽  
Vol 766 ◽  
Author(s):  
Barry J. Bauer ◽  
Ronald C. Hedden ◽  
Hae-Jeong Lee ◽  
Christopher L. Soles ◽  
Da-Wei Liu

AbstractSmall angle neutron and x-ray scattering (SANS, SAXS) are powerful tools in determination of the pore size and content of nano-porous materials with low dielectric constants (low-k) that are being developed as interlevel dielectrics. Several models have been previously applied to fit the scattering data in order to extract information on the average pore and/or matrix size. A new method has been developed to provide information on the size distributions of the pore and matrix phases based on the “chord length distribution” introduced by Tchoubar and Mering. Examples are given of scattering from samples that have size distributions that are narrower and broader than the random distribution typical of scattering described by Debye, Anderson, and Brumberger. An example of fitting SANS data to a phase size distribution is given.


2000 ◽  
Vol 37 (6) ◽  
pp. 1184-1194 ◽  
Author(s):  
Y Watabe ◽  
S Leroueil ◽  
J -P Le Bihan

The paper examines the hydraulic conductivity of a nonplastic till from northern Quebec. It is shown that the hydraulic conductivity is strongly influenced by the compaction degree of saturation, and the variation of hydraulic conductivity with void ratio is influenced by compaction conditions. Determination of pore-size distributions and microphotographs provide evidence that changes in hydraulic conductivity are related to the fabric of the compacted specimens and macroporosity developing when the soil is compacted at degrees of saturation less than that at the optimum.Key words: till, hydraulic conductivity, microfabric.


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