Atomic-level stress calculation and surface roughness of film deposition process using molecular dynamics simulation
2010 ◽
Vol 48
(3)
◽
pp. 520-528
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2020 ◽
Vol 135
◽
pp. 105570
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2014 ◽
Vol 140
(4)
◽
pp. 044326
◽
Keyword(s):
Molecular dynamics simulation of deposition process of ultrafine metal particles of MgO(100) surface
1992 ◽
Vol 60-61
◽
pp. 660-666
◽
2005 ◽
Vol 46
(6)
◽
pp. 1235-1239
◽
2012 ◽
Vol 53
(1)
◽
pp. 25-30
◽
2013 ◽
Vol 652-654
◽
pp. 1916-1924
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