Substrate bias effect on structure of tetrahedral amorphous carbon films by Raman spectroscopy

Diamond and Related Materials ◽

10.1016/j.diamond.2007.06.007 ◽

2007 ◽

Vol 16 (9) ◽

pp. 1746-1751 ◽

Author(s):

Fan-Xin Liu ◽

Kai-Lun Yao ◽

Zu-Li Liu

Keyword(s):

Raman Spectroscopy ◽

Amorphous Carbon ◽

Carbon Films ◽

Substrate Bias ◽

Bias Effect ◽

Amorphous Carbon Films ◽

Tetrahedral Amorphous Carbon

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Investigation of tetrahedral amorphous carbon films using x-ray photoelectron and Raman spectroscopy

Surface and Interface Analysis ◽

10.1002/(sici)1096-9918(199908)28:1<231::aid-sia583>3.0.co;2-3 ◽

1999 ◽

Vol 28 (1) ◽

pp. 231-234 ◽

Author(s):

B. K. Tay ◽

X. Shi ◽

H. S. Tan ◽

Daniel H. C. Chua

Keyword(s):

Raman Spectroscopy ◽

Amorphous Carbon ◽

Carbon Films ◽

Amorphous Carbon Films ◽

X Ray ◽

Tetrahedral Amorphous Carbon

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Effect of high substrate bias and hydrogen and nitrogen incorporation on spectroscopic ellipsometric and atomic force microscopic studies of tetrahedral amorphous carbon films

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2010.08.119 ◽

2010 ◽

Vol 205 (7) ◽

pp. 2126-2133 ◽

Author(s):

O.S. Panwar ◽

Mohd. Alim Khan ◽

Satyendra Kumar ◽

A. Basu ◽

B.R. Mehta ◽

...

Keyword(s):

Amorphous Carbon ◽

Carbon Films ◽

Substrate Bias ◽

Amorphous Carbon Films ◽

High Substrate ◽

Tetrahedral Amorphous Carbon ◽

Atomic Force ◽

Nitrogen Incorporation ◽

Microscopic Studies

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Correlation between substrate bias, growth process and structural properties of phosphorus incorporated tetrahedral amorphous carbon films

Applied Surface Science ◽

10.1016/j.apsusc.2007.05.040 ◽

2007 ◽

Vol 253 (23) ◽

pp. 9124-9129 ◽

Author(s):

Aiping Liu ◽

Jiaqi Zhu ◽

Jiecai Han ◽

Huaping Wu ◽

Zechun Jia

Keyword(s):

Structural Properties ◽

Amorphous Carbon ◽

Growth Process ◽

Carbon Films ◽

Substrate Bias ◽

Amorphous Carbon Films ◽

Tetrahedral Amorphous Carbon

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Raman spectroscopy and mechanical properties of multilayer tetrahedral amorphous carbon films

Thin Solid Films ◽

10.1016/j.tsf.2011.01.051 ◽

2011 ◽

Vol 519 (15) ◽

pp. 4906-4909 ◽

Author(s):

Sai Wang ◽

Jiaqi Zhu ◽

Jiazhi Wang ◽

Xunbo Yin ◽

Xiao Han

Keyword(s):

Mechanical Properties ◽

Raman Spectroscopy ◽

Amorphous Carbon ◽

Carbon Films ◽

Amorphous Carbon Films ◽

Tetrahedral Amorphous Carbon

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The effect of the substrate bias on structure and friction coefficient of tetrahedral amorphous carbon films deposited by filtered cathodic vacuum arc

Proceedings of the 2017 6th International Conference on Measurement, Instrumentation and Automation (ICMIA 2017) ◽

10.2991/icmia-17.2017.107 ◽

2017 ◽

Author(s):

Liang Han ◽

Wei Yang ◽

Bin Cui

Keyword(s):

Friction Coefficient ◽

Amorphous Carbon ◽

Carbon Films ◽

Substrate Bias ◽

Amorphous Carbon Films ◽

Tetrahedral Amorphous Carbon ◽

Filtered Cathodic Vacuum Arc

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Effect of high substrate bias and hydrogen and nitrogen incorporation on filtered cathodic vacuum arc deposited tetrahedral amorphous carbon films

Thin Solid Films ◽

10.1016/j.tsf.2007.09.024 ◽

2008 ◽

Vol 516 (8) ◽

pp. 2331-2340 ◽

Author(s):

O.S. Panwar ◽

Mohd. Alim Khan ◽

Mahesh Kumar ◽

S.M. Shivaprasad ◽

B.S. Satyanarayana ◽

...

Keyword(s):

Amorphous Carbon ◽

Carbon Films ◽

Substrate Bias ◽

Amorphous Carbon Films ◽

High Substrate ◽

Tetrahedral Amorphous Carbon ◽

Nitrogen Incorporation ◽

Filtered Cathodic Vacuum Arc

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Correlations between substrate bias, microstructure and surface morphology of tetrahedral amorphous carbon films

Vacuum ◽

10.1016/j.vacuum.2003.08.005 ◽

2003 ◽

Vol 72 (3) ◽

pp. 285-290 ◽

Author(s):

Jiaqi Zhu ◽

Jiecai Han ◽

Songhe Meng ◽

Jinghe Wang ◽

Weitao Zheng

Keyword(s):

Surface Morphology ◽

Amorphous Carbon ◽

Carbon Films ◽

Substrate Bias ◽

Amorphous Carbon Films ◽

Tetrahedral Amorphous Carbon

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Substrate tilting effect on structure of tetrahedral amorphous carbon films by Raman spectroscopy

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2007.01.030 ◽

2007 ◽

Vol 201 (16-17) ◽

pp. 7235-7240 ◽

Author(s):

Fan-Xin Liu ◽

Kai-Lun Yao ◽

Zu-Li Liu

Keyword(s):

Raman Spectroscopy ◽

Amorphous Carbon ◽

Carbon Films ◽

Amorphous Carbon Films ◽

Tetrahedral Amorphous Carbon

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Effect of high substrate bias and hydrogen and nitrogen incorporation on density of states and field-emission threshold in tetrahedral amorphous carbon films

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.3359586 ◽

2010 ◽

Vol 28 (2) ◽

pp. 411-422 ◽

Author(s):

O. S. Panwar ◽

M. A. Khan ◽

B. S. Satyanarayana ◽

R. Bhattacharyya ◽

B. R. Mehta ◽

...

Keyword(s):

Field Emission ◽

Density Of States ◽

Amorphous Carbon ◽

Carbon Films ◽

Substrate Bias ◽

Amorphous Carbon Films ◽

High Substrate ◽

Tetrahedral Amorphous Carbon ◽

Nitrogen Incorporation ◽

Emission Threshold

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Influence of hydrogen on the structure and properties of tetrahedral amorphous carbon films obtained by the filtered cathodic vacuum arc technique

Philosophical Magazine B ◽

10.1080/014186399256466 ◽

1999 ◽

Vol 79 (10) ◽

pp. 1647-1658

Author(s):

L. K. Cheah, X. Shi, E. Liu, B. K. Tay

Keyword(s):

Amorphous Carbon ◽

Carbon Films ◽

Structure And Properties ◽

Amorphous Carbon Films ◽

Tetrahedral Amorphous Carbon ◽

Filtered Cathodic Vacuum Arc

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