Structure and lubricated tribological behavior of silicon incorporated carbon nitride composite films deposited by magnetron sputtering

2018 ◽  
Vol 82 ◽  
pp. 115-123 ◽  
Author(s):  
D.G. Liu ◽  
L. Zheng ◽  
J.Q. Liu ◽  
L.M. Luo ◽  
Y.C. Wu
Keyword(s):  
Magnetron Sputtering ◽  
Carbon Nitride ◽  
Tribological Behavior ◽  
Composite Films

Influence of Zr Doping on the Tribological Properties of Amorphous Carbon-Nitride Coating

2019 ◽  
Vol 823 ◽  
pp. 9-14
Author(s):  
Yen Liang Su ◽  
Sun Hui Yao ◽  
Yu Chen Lai ◽  
Huang Ming Wu
Keyword(s):  
Magnetron Sputtering ◽  
Amorphous Carbon ◽  
Carbon Nitride ◽  
Tribological Behavior ◽  
Nitride Coating ◽  
Wear Performance ◽  
Amorphous Carbon Nitride ◽  
Pin On Disk ◽  
Nanohardness Tester ◽  
Sputtering System

This study aimed to understand the influence of small amount of Zr doping of amorphous carbonitride (a-CN) coatings on the structure, and mechanical and tribological behavior. The coatings were prepared using a four-target close-field unbalance magnetron sputtering system; two graphite, one Ti and one Zr targets were used. GDOS, SEM, XRD and XPS were used. A surface profilometer, a nanohardness tester, and a pin-on-disk wear tester were used. It was found the Zr doping resulting in the formation of ZrC and ZrN phases within the coating and the increase in the sp3 bonding fraction. The nanohardness was increased and the wear performance was largely improved.

Microstructure and tribological behavior of WS2–Ag composite films deposited by RF magnetron sputtering

2008 ◽  
Vol 516 (16) ◽  
pp. 5404-5408 ◽  
Author(s):  
X.H. Zheng ◽  
J.P. Tu ◽  
D.M. Lai ◽  
S.M. Peng ◽  
B. Gu ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Tribological Behavior ◽  
Composite Films ◽  
Rf Magnetron Sputtering

Evaluation on Structure and Tribological Properties of Carbon Nitride Films Deposited on YG8 Carbide Alloy Substrates

2011 ◽  
Vol 492 ◽  
pp. 80-84
Author(s):  
Jun Liu ◽  
Zhi Gang Chen ◽  
Kai Bi ◽  
Yue Min Wang
Keyword(s):  
Magnetron Sputtering ◽  
Photoelectron Spectroscopy ◽  
Carbon Nitride ◽  
Adhesive Wear ◽  
Tribological Behavior ◽  
Rf Magnetron Sputtering ◽  
X Ray ◽  
Carbide Alloy ◽  
C And N ◽  
Cnx Films

CNx films were deposited on YG8 carbide alloy (WC+8%Co) substrates by DC or RF magnetron sputtering. The composition, bonding state, adhesion, and tribological behavior of CNx films were researched. X-ray Photoelectron spectroscopy results showed that C-N, C=N and C≡N bond existed in CNx films. RF magnetron sputtering is in favor of the bonding of C and N, the adhesion and the wear resistance of CNx films. DC magnetron sputtering is in favor of lubricating ability of CNx films. Substrate bias has some effect on the bonding of C and N, the adhesion of the films, decrease of adhesive wear and the friction coefficient of films.

Effect of target self-bias on carbon nitride thin films deposited by RF magnetron sputtering

2001 ◽  
Vol 118 (4) ◽  
pp. 179-182 ◽  
Author(s):  
O. Durand-Drouhin ◽  
M. Lejeune ◽  
M. Clin ◽  
D. Ballutaud ◽  
M. Benlahsen
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Carbon Nitride ◽  
Rf Magnetron Sputtering ◽  
Self Bias

Colorful carbon nitride based composite films

2020 ◽  
Vol 511 ◽  
pp. 145535 ◽  
Author(s):  
Wei Xiong ◽  
Miaoyan Huang ◽  
Fei Huang ◽  
Rui-Qin Zhang
Keyword(s):  
Carbon Nitride ◽  
Composite Films
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