Deposition phenomena of diamond-like carbon coating on inner surface of circular metal tube by nanopulse plasma chemical vapor deposition

2021 ◽  
pp. 108749
Author(s):  
Yoshinao Iwamoto ◽  
Yuki Hirata ◽  
Ryota Takamura ◽  
Hiroki Akasaka ◽  
Naoto Ohtake
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Carbon Coating ◽  
Chemical Vapor ◽  
Diamond Like Carbon ◽  
Metal Tube ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition ◽  
Inner Surface

Synthesis of Diamond-Like Carbon Films by Nanopulse Plasma Chemical Vapor Deposition in Open Air

2005 ◽  
Vol 44 (No. 52) ◽  
pp. L1573-L1575 ◽  
Author(s):  
Yoshimasa Kondo ◽  
Takao Saito ◽  
Tatsuya Terazawa ◽  
Masanori Saito ◽  
Naoto Ohtake
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition

CATALYTIC EFFECTS OF FERROCENE ON BONDING, OPTICAL AND STRUCTURAL PROPERTIES OF DIAMOND-LIKE CARBON FILMS DEPOSITED BY MICROWAVE SURFACE-WAVE PLASMA CHEMICAL VAPOR DEPOSITION

2006 ◽  
Vol 13 (06) ◽  
pp. 789-793 ◽  
Author(s):  
SUDIP ADHIKARI ◽  
SUNIL ADHIKARY ◽  
HIDEO UCHIDA ◽  
MASAYOSHI UMENO
Keyword(s):  
Chemical Vapor Deposition ◽  
Surface Wave ◽  
Structural Properties ◽  
Vapor Deposition ◽  
Optical Band Gap ◽  
Chemical Vapor ◽  
Diamond Like Carbon ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition ◽  
Catalytic Effects

This paper reports catalytic effects of ferrocene on bonding, optical and structural properties of diamond-like carbon (DLC) thin films grown on silicon and quartz substrates by microwave surface-wave plasma chemical vapor deposition. For film deposition, helium and methane gases were used as plasma source. Bonding, optical and structural properties of the DLC films were measured both with and without using ferrocene as a catalyst. The ferrocene content in the DLC was confirmed by X-ray spectroscopy (XPS) measurement. The optical band gap decreased from 2.7 eV (without ferrocene) to 1.6 eV (with ferrocene). Raman spectra of the ferrocene content film shows that the G-peak was more pronounced compared to the film without ferrocene. Results suggest that appropriate concentration of ferrocene in DLC film helps to reduce the optical band gap because of ferrocene-induced graphitization.

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