3D characterisation of debris clouds under hypervelocity impact with large-field pulsed digital in-line holography

2021 ◽  
Vol 154 ◽  
pp. 103875
Author(s):  
Zhi-liang Xue ◽  
Ai-min Xie ◽  
You-qi Zhu ◽  
Yun-hao Zhong ◽  
Ying-chun Wu ◽  
...  
Keyword(s):  
Hypervelocity Impact ◽  
Large Field

Failure Analysis and Defect Inspection of Electronic Devices by High-Resolution Cathodoluminescence

2017 ◽  
Author(s):  
C. Monachon ◽  
M.S. Zielinski ◽  
D. Gachet ◽  
S. Sonderegger ◽  
S. Muckenhirn ◽  
...  
Keyword(s):  
Failure Analysis ◽  
Electronic Materials ◽  
Electronic Devices ◽  
Optical Emission ◽  
Large Field ◽  
Nanometer Scale ◽  
Defect Analysis ◽  
Defect Inspection ◽  
Spectrally Resolved ◽  
Non Destructive

Abstract Quantitative cathodoluminescence (CL) microscopy is a new optical spectroscopy technique that measures electron beam-induced optical emission over large field of view with a spatial resolution close to that of a scanning electron microscope (SEM). Correlation of surface morphology (SE contrast) with spectrally resolved and highly material composition sensitive CL emission opens a new pathway in non-destructive failure and defect analysis at the nanometer scale. Here we present application of a modern CL microscope in defect and homogeneity metrology, as well as failure analysis in semiconducting electronic materials

Numerical analysis of shift error in X-ray phase contrast imaging for large field of view

2017 ◽  
Vol 34 (1) ◽  
pp. 8
Author(s):  
Jianheng Huang ◽  
Yaohu Lei ◽  
Xin Liu ◽  
Jinchuan Guo ◽  
Ji Li ◽  
...  
Keyword(s):  
Numerical Analysis ◽  
Phase Contrast ◽  
Field Of View ◽  
Phase Contrast Imaging ◽  
Large Field ◽  
Contrast Imaging ◽  
X Ray
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