Indium oxide thin film prepared by low temperature atomic layer deposition using liquid precursors and ozone oxidant
2015 ◽
Vol 649
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pp. 216-221
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Keyword(s):
Keyword(s):
2015 ◽
Vol 46
(S1)
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pp. 52-52
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Keyword(s):
2016 ◽
Vol 8
(40)
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pp. 26924-26931
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2014 ◽
Vol 6
(20)
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pp. 17481-17488
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2016 ◽
Vol 4
(28)
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pp. 6873-6880
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2012 ◽
Vol 51
(2S)
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pp. 02BF04
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2011 ◽
Keyword(s):
2012 ◽
Vol 18
(6)
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pp. 1055-1060
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Keyword(s):
2012 ◽
Vol 51
(2)
◽
pp. 02BF04
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Keyword(s):