Molecular dynamics study of crystal orientation effect on surface generation mechanism of single-crystal silicon during the nano-grinding process

Journal of Manufacturing Processes ◽

10.1016/j.jmapro.2021.12.014 ◽

2022 ◽

Vol 74 ◽

pp. 190-200

Author(s):

Pengyue Zhao ◽

Jiansheng Pan ◽

Bo Zhao ◽

Jianwei Wu

Keyword(s):

Molecular Dynamics ◽

Single Crystal ◽

Crystal Orientation ◽

Single Crystal Silicon ◽

Generation Mechanism ◽

Orientation Effect ◽

Surface Generation ◽

Grinding Process ◽

Crystal Silicon

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430 Fracture toughness of single crystal silicon thin film : Temperature and crystal orientation effect

The proceedings of the JSME annual meeting ◽

10.1299/jsmemecjo.2008.8.0_159 ◽

2008 ◽

Vol 2008.8 (0) ◽

pp. 159-160 ◽

Author(s):

Takafumi TAKUMI ◽

Sigeki NAKAO ◽

Taeko ANDO ◽

Kazuo SATO

Keyword(s):

Thin Film ◽

Fracture Toughness ◽

Single Crystal ◽

Crystal Orientation ◽

Single Crystal Silicon ◽

Orientation Effect ◽

Silicon Thin Film ◽

Crystal Silicon

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Effects of grinding speeds on the subsurface damage of single crystal silicon based on molecular dynamics simulations

Applied Surface Science ◽

10.1016/j.apsusc.2021.149668 ◽

2021 ◽

pp. 149668

Author(s):

Penghui Li ◽

Xiaoguang Guo ◽

Song Yuan ◽

Ming Li ◽

Renke Kang ◽

...

Keyword(s):

Molecular Dynamics ◽

Single Crystal ◽

Molecular Dynamics Simulations ◽

Single Crystal Silicon ◽

Subsurface Damage ◽

Crystal Silicon ◽

Dynamics Simulations ◽

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Molecular Dynamics Analysis for Effect of Defect Size on Fracture Behavior of Single Crystal Silicon

TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A ◽

10.1299/kikaia.72.1131 ◽

2006 ◽

Vol 72 (720) ◽

pp. 1131-1136

Author(s):

Tomoyuki FUJII ◽

Yoshiaki AKINIWA

Keyword(s):

Molecular Dynamics ◽

Single Crystal ◽

Fracture Behavior ◽

Single Crystal Silicon ◽

Defect Size ◽

Dynamics Analysis ◽

Crystal Silicon

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Fracture properties of nanoscale single-crystal silicon plates: Molecular dynamics simulations and finite element method

Engineering Fracture Mechanics ◽

10.1016/j.engfracmech.2018.09.006 ◽

2018 ◽

Vol 202 ◽

pp. 1-19 ◽

Author(s):

Yu Wei ◽

Yongheng Li ◽

Dandan Huang ◽

Chujia Zhou ◽

Junhua Zhao

Keyword(s):

Finite Element Method ◽

Molecular Dynamics ◽

Finite Element ◽

Single Crystal ◽

Molecular Dynamics Simulations ◽

Single Crystal Silicon ◽

Crystal Silicon ◽

Fracture Properties ◽

Dynamics Simulations ◽

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Molecular dynamics analysis for fracture behaviour of single crystal silicon thin film with micro notch

Modelling and Simulation in Materials Science and Engineering ◽

10.1088/0965-0393/14/5/s09 ◽

2006 ◽

Vol 14 (5) ◽

pp. S73-S83 ◽

Author(s):

T Fujii ◽

Y Akiniwa

Keyword(s):

Thin Film ◽

Molecular Dynamics ◽

Single Crystal ◽

Fracture Behaviour ◽

Single Crystal Silicon ◽

Dynamics Analysis ◽

Silicon Thin Film ◽

Crystal Silicon

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103 Investigation of micro-defect effect on material properties of single crystal silicon based on molecular dynamics simulation

The Proceedings of Ibaraki District Conference ◽

10.1299/jsmeibaraki.2012.20.5 ◽

2012 ◽

Vol 2012.20 (0) ◽

pp. 5-6

Author(s):

Keita TACHIKAWA ◽

Toshihiro KAMEDA

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Single Crystal ◽

Material Properties ◽

Single Crystal Silicon ◽

Dynamics Simulation ◽

Crystal Silicon ◽

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1313 Effects of Crystal Orientation on Martens Hardness of Single-Crystal Silicon in Nanoindentation Method

The Proceedings of Conference of Kanto Branch ◽

10.1299/jsmekanto.2012.18.431 ◽

2012 ◽

Vol 2012.18 (0) ◽

pp. 431-432

Author(s):

Katsumi FUKUDA ◽

Mitsuo KOBAYASHI ◽

Akira KAKUTA ◽

Chika TAKAAZE ◽

Chie HONDA

Keyword(s):

Single Crystal ◽

Crystal Orientation ◽

Single Crystal Silicon ◽

Crystal Silicon ◽

Martens Hardness

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J2210305 Crystal orientation dependence of fracture probability in single crystal silicon

The Proceedings of Mechanical Engineering Congress Japan ◽

10.1299/jsmemecj.2015._j2210305- ◽

2015 ◽

Vol 2015 (0) ◽

pp. _J2210305--_J2210305-

Author(s):

Tsuyoshi IKEHARA ◽

Toshiyuki TSUCHIYA

Keyword(s):

Single Crystal ◽

Crystal Orientation ◽

Single Crystal Silicon ◽

Orientation Dependence ◽

Fracture Probability ◽

Crystal Silicon

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20pm3-PM004 Effect of crystal orientation and environment on fatigue lifetime of single crystal silicon

The Proceedings of the Symposium on Micro-Nano Science and Technology ◽

10.1299/jsmemnm.2014.6._20pm3-pm0_4 ◽

2014 ◽

Vol 2014.6 (0) ◽

pp. _20pm3-PM0-_20pm3-PM0

Author(s):

Arasu Udhayakumar ◽

Hayato Izumi ◽

Kozo Koiwa ◽

Shoji Kamiya

Keyword(s):

Single Crystal ◽

Crystal Orientation ◽

Single Crystal Silicon ◽

Crystal Silicon ◽

Fatigue Lifetime

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MOLECULAR DYNAMICS SIMULATION AND THEORETICAL STUDY ON IN-PLANE THERMAL CONDUCTIVITY OF SINGLE CRYSTAL SILICON FILM AT NANOSCALE

Equipment ◽

10.1615/ihtc13.p8.100 ◽

2006 ◽

Author(s):

Zhi-Xin Li ◽

P. Xiao

Keyword(s):

Thermal Conductivity ◽

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Single Crystal ◽

Theoretical Study ◽

Silicon Film ◽

Single Crystal Silicon ◽

Dynamics Simulation ◽

Crystal Silicon

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