scholarly journals Comparison of sputtering and atomic layer deposition based ultra-thin alumina protective layers for high temperature surface acoustic wave devices

2021 ◽  
Author(s):  
Miling Zhang ◽  
Jinkai Chen ◽  
Weipeng Xuan ◽  
Xinyu Song ◽  
Hongsheng Xu ◽  
...  
Keyword(s):  
High Temperature ◽  
Atomic Layer Deposition ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Atomic Layer ◽  
Protective Layers ◽  
Layer Deposition ◽  
Acoustic Wave Devices ◽  
Temperature Surface

scholarly journals Thin Film Electrodes for High Temperature Surface Acoustic Wave Devices

2011 ◽  
Vol 25 ◽  
pp. 168-171 ◽  
Author(s):  
D. Richter ◽  
S. Sakharov ◽  
E. Forsén ◽  
E. Mayer ◽  
L. Reindl ◽  
...  
Keyword(s):  
Thin Film ◽  
High Temperature ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Thin Film Electrodes ◽  
Acoustic Wave Devices ◽  
Temperature Surface

scholarly journals Fabrication of high temperature surface acoustic wave devices for sensor applications

2005 ◽  
Vol 123-124 ◽  
pp. 403-407 ◽  
Author(s):  
M.N. Hamidon ◽  
V. Skarda ◽  
N.M. White ◽  
F. Krispel ◽  
P. Krempl ◽  
...  
Keyword(s):  
High Temperature ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Sensor Applications ◽  
Acoustic Wave Devices ◽  
Temperature Surface

New Composite Electrode for High Temperature Surface Acoustic Wave Device

2021 ◽  
pp. 129768
Author(s):  
Xinyu Song ◽  
Hao Jin ◽  
Shurong Dong ◽  
Miling Zhang ◽  
Jikai Zhang ◽  
...  
Keyword(s):  
High Temperature ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Composite Electrode ◽  
Surface Acoustic Wave Device ◽  
Acoustic Wave Device ◽  
Wave Device ◽  
Temperature Surface

In situ high-temperature characterization of AlN-based surface acoustic wave devices

2013 ◽  
Vol 114 (1) ◽  
pp. 014505 ◽  
Author(s):  
Thierry Aubert ◽  
Jochen Bardong ◽  
Ouarda Legrani ◽  
Omar Elmazria ◽  
M. Badreddine Assouar ◽  
...  
Keyword(s):  
High Temperature ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Acoustic Wave Devices

Surface acoustic wave devices based on AlN/sapphire structure for high temperature applications

2010 ◽  
Vol 96 (20) ◽  
pp. 203503 ◽  
Author(s):  
Thierry Aubert ◽  
Omar Elmazria ◽  
Badreddine Assouar ◽  
Laurent Bouvot ◽  
Mourad Oudich
Keyword(s):  
High Temperature ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Acoustic Wave Devices ◽  
Temperature Applications
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