Structure and Electrical Characteristics of Zinc Oxide Thin Films Grown on Si (111) by Metal-organic Chemical Vapor Deposition

2013 ◽  
Vol 29 (9) ◽  
pp. 830-834 ◽  
Author(s):  
Yunfeng Wu ◽  
Dongping Liu ◽  
Naisen Yu ◽  
Yuanda Liu ◽  
Hongwei Liang ◽  
...  
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Electrical Characteristics ◽  
Oxide Thin Films ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

Metal-organic chemical vapor deposition of aluminum oxide thin films via pyrolysis of dimethylaluminum isopropoxide

2010 ◽  
Vol 28 (2) ◽  
pp. 238-243 ◽  
Author(s):  
Benjamin W. Schmidt ◽  
William J. Sweet ◽  
Eric J. Bierschenk ◽  
Cameron K. Gren ◽  
Timothy P. Hanusa ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Aluminum Oxide ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Oxide Thin Films ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

Boron-doped zinc oxide thin films for large-area solar cells grown by metal organic chemical vapor deposition

2007 ◽  
Vol 515 (7-8) ◽  
pp. 3753-3759 ◽  
Author(s):  
X.L. Chen ◽  
B.H. Xu ◽  
J.M. Xue ◽  
Y. Zhao ◽  
C.C. Wei ◽  
...  
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Large Area ◽  
Boron Doped ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition
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