Structural and electrical properties of magnetron sputtered Ti(ON) thin films: The case of TiN doped in situ with oxygen
2009 ◽
Vol 194
(1)
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pp. 93-103
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2011 ◽
Vol 3
(10)
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pp. 1-4
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2004 ◽
Vol 7
(2)
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pp. 363-367
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2005 ◽
Vol 59
(22)
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pp. 2759-2764
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