Indium tin oxide films deposited by thermionic-enhanced DC magnetron sputtering on unheated polyethylene terephthalate polymer substrate

2009 ◽  
Vol 44 (8) ◽  
pp. 1760-1764 ◽  
Author(s):  
Y.F. Lan ◽  
W.C. Peng ◽  
Y.H. Lo ◽  
J.L. He
Keyword(s):  
Magnetron Sputtering ◽  
Polyethylene Terephthalate ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Films ◽  
Polymer Substrate ◽  
Dc Magnetron Sputtering ◽  
Tin Oxide Films

Indium–tin oxide films obtained by DC magnetron sputtering for improved Si heterojunction solar cell applications

2015 ◽  
Vol 24 (11) ◽  
pp. 117703 ◽  
Author(s):  
Jin-Hua Gu ◽  
Jia-Le Si ◽  
Jiu-Xiu Wang ◽  
Ya-Yang Feng ◽  
Xiao-Yong Gao ◽  
...  
Keyword(s):  
Solar Cell ◽  
Magnetron Sputtering ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Films ◽  
Heterojunction Solar Cell ◽  
Dc Magnetron Sputtering ◽  
Tin Oxide Films

Low resistivity indium tin oxide films deposited by unbalanced DC magnetron sputtering

1999 ◽  
Vol 341 (1-2) ◽  
pp. 225-229 ◽  
Author(s):  
S.H Shin ◽  
J.H Shin ◽  
K.J Park ◽  
T Ishida ◽  
O Tabata ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Films ◽  
Dc Magnetron Sputtering ◽  
Low Resistivity ◽  
Tin Oxide Films
Sign in / Sign up

Export Citation Format

Share Document