Characterization of indium tin oxide films by RF-assisted DC magnetron sputtering

2012 ◽  
Vol 258 (15) ◽  
pp. 5593-5598 ◽  
Author(s):  
Boen Houng ◽  
Adam Wang
Keyword(s):  
Magnetron Sputtering ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Films ◽  
Dc Magnetron Sputtering ◽  
Tin Oxide Films

Preparation and characterization of tantalum-doped indium tin oxide films deposited by magnetron sputtering

2008 ◽  
Vol 58 (3) ◽  
pp. 203-206 ◽  
Author(s):  
Bo Zhang ◽  
Xianping Dong ◽  
Xiaofeng Xu ◽  
Jiansheng Wu
Keyword(s):  
Magnetron Sputtering ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Films ◽  
Tin Oxide Films

Indium–tin oxide films obtained by DC magnetron sputtering for improved Si heterojunction solar cell applications

2015 ◽  
Vol 24 (11) ◽  
pp. 117703 ◽  
Author(s):  
Jin-Hua Gu ◽  
Jia-Le Si ◽  
Jiu-Xiu Wang ◽  
Ya-Yang Feng ◽  
Xiao-Yong Gao ◽  
...  
Keyword(s):  
Solar Cell ◽  
Magnetron Sputtering ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Films ◽  
Heterojunction Solar Cell ◽  
Dc Magnetron Sputtering ◽  
Tin Oxide Films

Low resistivity indium tin oxide films deposited by unbalanced DC magnetron sputtering

1999 ◽  
Vol 341 (1-2) ◽  
pp. 225-229 ◽  
Author(s):  
S.H Shin ◽  
J.H Shin ◽  
K.J Park ◽  
T Ishida ◽  
O Tabata ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Films ◽  
Dc Magnetron Sputtering ◽  
Low Resistivity ◽  
Tin Oxide Films
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