Mid-infrared autocollimation for linear motion error measurement

Simultaneous rotary-translational (R-T) axis motion error has significant influence on multi-axis machine tool precision. To improve multi-axis machine tool precision, axis motion error measurement and trace method are investigated in this study. A sensorless R-T axis motion error measurement and trace technology based on virtual bar is proposed. Firstly, the fundamental sensorless test principle is discussed. Then, the virtual-bar-based test path of a circular test though a rotary axis and two translational axes motion is scheduled. The mathematical model of motion error is established. Furthermore, to identify the error source, spatial error charts and some advanced signal processing and feature extraction technologies, such as wavelet transform and frequency analysis, are used. The analysis of experimental results shows that it is practical and efficient to use the virtual bar and the sensorless information to estimate motion error.

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Measurement of Five DOF Motion Errors in the Ultra Precision Feed Tables

Materials Science Forum ◽

10.4028/www.scientific.net/msf.505-507.187 ◽

2006 ◽

Vol 505-507 ◽

pp. 187-192 ◽

Cited By ~ 1

Author(s):

Yoon Jin Oh ◽

Chun Hong Park ◽

J.H. Hwang ◽

Deug Woo Lee

Keyword(s):

Degrees Of Freedom ◽

Laser Interferometer ◽

Point Method ◽

Straight Edge ◽

Roll Motion ◽

Error Measurement ◽

Linear Motion ◽

Pitch Motion ◽

Ultra Precision ◽

Measuring Scheme

Five degrees-of-freedom (DOF) motion errors of an ultra precision feed table were measured in this study. The laser interferometer was used to measure the yaw and pitch errors and the reversal method was used for the roll error measurement. The linear motion errors in the vertical and horizontal directions were measured using the sequential two point method. The influence of angular motion errors on the linear motion errors while applying the sequential two point method was compensated with the data from the laser interferometer and the reversal method. Capacitive type sensors and an optical straight edge were used while applying the reversal method and the sequential two point method. To demonstrate the effectiveness of our measuring scheme for the ultra precision feed tables, five DOF motion errors of a hydrostatic table driven by a linear motor were measured and presented. From the measured repeatabilities of 5 DOF error motions, it was estimated that the measuring accuracies were ±0.02 μm for the horizontal and vertical linear motion, ±0.04 arcsec for yaw motion, ±0.05 arcsec for pitch motion and ±0.02 arcsec for roll motion.

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Mathematical modelling of linear motion error for Hexarot parallel manipulators

Applied Mathematical Modelling ◽

10.1016/j.apm.2015.07.004 ◽

2016 ◽

Vol 40 (2) ◽

pp. 942-954 ◽

Cited By ~ 25

Author(s):

Siamak Pedrammehr ◽

Mohammad Reza Chalak Qazani ◽

Hamid Abdi ◽

Saeid Nahavandi

Keyword(s):

Mathematical Modelling ◽

Parallel Manipulators ◽

Linear Motion ◽

Motion Error

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Multi-degree-of-freedom motion error measurement in an ultraprecision machine using laser encoder — Review

Journal of Mechanical Science and Technology ◽

10.1007/s12206-012-1217-6 ◽

2013 ◽

Vol 27 (1) ◽

pp. 141-152 ◽

Cited By ~ 26

Author(s):

ChaBum Lee ◽

Sun-Kyu Lee

Keyword(s):

Degree Of Freedom ◽

Error Measurement ◽

Motion Error

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A Method of Calculating Motion Error in a Linear Motion Bearing Stage

The Scientific World JOURNAL ◽

10.1155/2015/696417 ◽

2015 ◽

Vol 2015 ◽

pp. 1-10

Author(s):

Gyungho Khim ◽

Chun Hong Park ◽

Jeong Seok Oh

Keyword(s):

Transfer Function ◽

Function Method ◽

Linear Motion ◽

Motion Error ◽

Form Errors ◽

Transfer Function Method ◽

Reaction Forces ◽

Good Agreement

We report a method of calculating the motion error of a linear motion bearing stage. The transfer function method, which exploits reaction forces of individual bearings, is effective for estimating motion errors; however, it requires the rail-form errors. This is not suitable for a linear motion bearing stage because obtaining the rail-form errors is not straightforward. In the method described here, we use the straightness errors of a bearing block to calculate the reaction forces on the bearing block. The reaction forces were compared with those of the transfer function method. Parallelism errors between two rails were considered, and the motion errors of the linear motion bearing stage were measured and compared with the results of the calculations, revealing good agreement.

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Experiments on the Porch Swing Bearing of Michelson Interferometer for Low Resolution FTIR

Advances in Optical Technologies ◽

10.1155/2013/948638 ◽

2013 ◽

Vol 2013 ◽

pp. 1-9

Author(s):

Tuomas Välikylä ◽

Jyrki Kauppinen

Keyword(s):

Fourier Transform ◽

Laser Beam ◽

Modulation Depth ◽

Michelson Interferometer ◽

Fourier Transform Spectrometer ◽

Linear Motion ◽

Low Resolution ◽

Mid Infrared ◽

Manufacturing Tolerances ◽

Adjustment Mechanisms

Porch swing bearing for the linear motion of the mirror in Michelson interferometer for mid-infrared low resolution Fourier transform spectrometer was studied experimentally using the modulation depth of the collimated laser beam. The mirror tilting was measured to be lower than 5 μrad over 3 mm mirror travel using two different bearings assemblies. Additionally, the manufacturing tolerances of the bearing type were proved to be loose enough not to limit the interferometer application. These demonstrate that the porch swing without any adjustment mechanisms provides the sufficient motion linearity.

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