Magnetic disturbance compensation for a reticle stage in a lithographic tool

Mechatronics ◽  
2013 ◽  
Vol 23 (6) ◽  
pp. 559-565 ◽  
Author(s):  
Hans Butler
Keyword(s):  
Magnetic Disturbance ◽  
Disturbance Compensation

Integrated calibration and magnetic disturbance compensation of three-axis magnetometers

Measurement ◽  
2016 ◽  
Vol 93 ◽  
pp. 409-413 ◽  
Author(s):  
Hongfeng Pang ◽  
Mengchun Pan ◽  
Jinfei Chen ◽  
Ji Li ◽  
Qi Zhang ◽  
...  
Keyword(s):  
Magnetic Disturbance ◽  
Disturbance Compensation

Magnetic Emission Mapping for Passive Integrated Components Characterisation

2003 ◽  
Author(s):  
O. Crépel ◽  
Y. Bouttement ◽  
P. Descamps ◽  
C. Goupil ◽  
P. Perdu ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Mobile Phone ◽  
Printed Circuit Board ◽  
Magnetic Sensors ◽  
Circuit Board ◽  
Magnetic Disturbance ◽  
Passive Components ◽  
Printed Circuit ◽  
Integrated Inductor ◽  
The Magnetic Field

Abstract We developed a system and a method to characterize the magnetic field induced by circuit board and electronic component, especially integrated inductor, with magnetic sensors. The different magnetic sensors are presented and several applications using this method are discussed. Particularly, in several semiconductor applications (e.g. Mobile phone), active dies are integrated with passive components. To minimize magnetic disturbance, arbitrary margin distances are used. We present a system to characterize precisely the magnetic emission to insure that the margin is sufficient and to reduce the size of the printed circuit board.

scholarly journals Robust Quadrotor Control through Reinforcement Learning with Disturbance Compensation

2021 ◽  
Vol 11 (7) ◽  
pp. 3257
Author(s):  
Chen-Huan Pi ◽  
Wei-Yuan Ye ◽  
Stone Cheng
Keyword(s):  
Neural Network ◽  
Reinforcement Learning ◽  
Control Strategy ◽  
External Disturbance ◽  
Control Agent ◽  
Network Control ◽  
Outdoor Environment ◽  
Disturbance Compensation ◽  
Tracking Accuracy ◽  
Control Scheme

In this paper, a novel control strategy is presented for reinforcement learning with disturbance compensation to solve the problem of quadrotor positioning under external disturbance. The proposed control scheme applies a trained neural-network-based reinforcement learning agent to control the quadrotor, and its output is directly mapped to four actuators in an end-to-end manner. The proposed control scheme constructs a disturbance observer to estimate the external forces exerted on the three axes of the quadrotor, such as wind gusts in an outdoor environment. By introducing an interference compensator into the neural network control agent, the tracking accuracy and robustness were significantly increased in indoor and outdoor experiments. The experimental results indicate that the proposed control strategy is highly robust to external disturbances. In the experiments, compensation improved control accuracy and reduced positioning error by 75%. To the best of our knowledge, this study is the first to achieve quadrotor positioning control through low-level reinforcement learning by using a global positioning system in an outdoor environment.

scholarly journals Disturbance compensation-based output feedback adaptive control for shape memory alloy actuator system

2021 ◽  
Vol 18 (1) ◽  
pp. 172988142199399
Author(s):  
Xiaoguang Li ◽  
Bi Zhang ◽  
Daohui Zhang ◽  
Xingang Zhao ◽  
Jianda Han
Keyword(s):  
Adaptive Control ◽  
Shape Memory Alloy ◽  
Shape Memory ◽  
Control Method ◽  
Control Law ◽  
Reference Trajectory ◽  
Disturbance Compensation ◽  
Comparison Results ◽  
Control Scheme ◽  
Actuator System

Shape memory alloy (SMA) has been utilized as the material of smart actuators due to the miniaturization and lightweight. However, the nonlinearity and hysteresis of SMA material seriously affect the precise control. In this article, a novel disturbance compensation-based adaptive control scheme is developed to improve the control performance of SMA actuator system. Firstly, the nominal model is constructed based on the physical process. Next, an estimator is developed to online update not only the unmeasured system states but also the total disturbance. Then, the novel adaptive controller, which is composed of the nominal control law and the compensation control law, is designed. Finally, the proposed scheme is evaluated in the SMA experimental setup. The comparison results have demonstrated that the proposed control method can track reference trajectory accurately, reject load variations and stochastic disturbances timely, and exhibit satisfactory robust stability. The proposed control scheme is system independent and has some potential in other types of SMA-actuated systems.

Modeling and Control of Piezoelectric Hysteresis: A Polynomial-Based Fractional Order Disturbance Compensation Approach

2021 ◽  
Vol 68 (4) ◽  
pp. 3348-3358
Author(s):  
Chen Yang ◽  
Nicolas Verbeek ◽  
Fangzhou Xia ◽  
Yi Wang ◽  
Kamal Youcef-Toumi
Keyword(s):  
Fractional Order ◽  
Disturbance Compensation ◽  
Modeling And Control ◽  
Compensation Approach ◽  
And Control

scholarly journals An Underwater Quadrotor Control with Wave-disturbance Compensation by a UKF

2020 ◽  
Vol 53 (2) ◽  
pp. 9017-9022
Author(s):  
T. Ohhira ◽  
A. Kawamura ◽  
A. Shimada ◽  
T. Murakami
Keyword(s):  
Wave Disturbance ◽  
Disturbance Compensation ◽  
Quadrotor Control
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