C-FEBID etching mask and C-FEBID in-situ removal; enabling a new micro- and nano fabrication route

With rapid expansion of nanotechnology, microminiaturization has become imperative in the field of micro/nano fabrication. A nanomanipulation system with high degrees of freedom that can perform nanomachining, nanofabrication and mechanical/electrical characterization of nanoscale objects inside a scanning electron microscope (SEM) is presented. The manipulation system consists of several individual operating units each having three linear stages and one rotational stage. The body of the manipulator is designed using the idea of superposition. Each operating unit can move in the permissible range of SEM’s vacuum chamber and can increase or decrease the number of units according to the requirement. Experiments were executed to investigate the in-situ electrical resistance of nano materials.

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Photonic Nanojet Sub-Diffraction Nano-Fabrication With in situ Super-Resolution Imaging

IEEE Transactions on Nanotechnology ◽

10.1109/tnano.2019.2896220 ◽

2019 ◽

Vol 18 ◽

pp. 226-233 ◽

Cited By ~ 4

Author(s):

Yangdong Wen ◽

Haibo Yu ◽

Wenxiu Zhao ◽

Feifei Wang ◽

Xiaoduo Wang ◽

...

Keyword(s):

Super Resolution ◽

Nano Fabrication ◽

Photonic Nanojet ◽

Resolution Imaging

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Tipping solutions: emerging 3D nano-fabrication/ -imaging technologies

Nanophotonics ◽

10.1515/nanoph-2017-0008 ◽

2017 ◽

Vol 6 (5) ◽

pp. 923-941 ◽

Cited By ~ 20

Author(s):

Gediminas Seniutinas ◽

Armandas Balčytis ◽

Ignas Reklaitis ◽

Feng Chen ◽

Jeffrey Davis ◽

...

Keyword(s):

Focused Ion Beam ◽

Imaging Technique ◽

Ion Beam ◽

Three Dimensional ◽

Molecular Systems ◽

Force Microscopy ◽

Nano Fabrication ◽

Atomic Force ◽

Scanning Electron

AbstractThe evolution of optical microscopy from an imaging technique into a tool for materials modification and fabrication is now being repeated with other characterization techniques, including scanning electron microscopy (SEM), focused ion beam (FIB) milling/imaging, and atomic force microscopy (AFM). Fabrication and in situ imaging of materials undergoing a three-dimensional (3D) nano-structuring within a 1−100 nm resolution window is required for future manufacturing of devices. This level of precision is critically in enabling the cross-over between different device platforms (e.g. from electronics to micro-/nano-fluidics and/or photonics) within future devices that will be interfacing with biological and molecular systems in a 3D fashion. Prospective trends in electron, ion, and nano-tip based fabrication techniques are presented.

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The Bio-Nano-Process: Making Semiconductor Devices Using Protein Supramolecules.

MRS Proceedings ◽

10.1557/proc-873-k5.1 ◽

2005 ◽

Vol 873 ◽

Cited By ~ 1

Author(s):

Ichiro Yamashita

Keyword(s):

Research Area ◽

Two Dimensional ◽

Semiconductor Technology ◽

Nano Structure ◽

Nano Fabrication ◽

Heat Treated ◽

New Process ◽

Etching Mask ◽

Uv Ozone ◽

Neutral Beam Etching

AbstractThe biology and semiconductor technology have progressed independently. There was a large distance between them and a substantial interdisciplinary research area was left untouched. Recently, this situation is gradually changing. Some researchers are stimulating semiconductor technology by introducing bio-molecules into the nano-fabrication process. We proposed a new process for fabricating functional nano-structure on a solid surface using protein supramolecules, which we named “Bio Nano Process” (BNP). We employed a cage-shaped protein, apoferritin and synthesized several kinds of nanoparticles (NP) in the apoferritin cavity. A two-dimensional array of them was made on the silicon wafer and this array was heat treated or UV/ozone treated. These processes produced a two-dimensional inorganic NP array on the silicon surface. The size of the NP is small enough to be used as quantum dot and the floating nanodots memory using this NP array is now under development. We also proposed another application of the BNP, making use of the obtained nanodot array as the nanometric etching mask. This was realized by employing the neutral beam etching and 7nm Si nano columns with high aspect ratio were fabricated. These experimental results demonstrate that the BNP can fabricate the inorganic nanostructure using protein supramolecules and the BNP opened up a biological path to nanoelectronics devices.

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Rendez vous with Saturn's rings

International Astronomical Union Colloquium ◽

10.1017/s0252921100101885 ◽

1984 ◽

Vol 75 ◽

pp. 743-759 ◽

Cited By ~ 2

Author(s):

Kerry T. Nock

Keyword(s):

Solar Energy ◽

Electric Propulsion ◽

Power Source ◽

Propulsion System ◽

Low Thrust ◽

Ring Plane ◽

The Earth ◽

Total Impulse ◽

Saturn's Rings

ABSTRACTA mission to rendezvous with the rings of Saturn is studied with regard to science rationale and instrumentation and engineering feasibility and design. Future detailedin situexploration of the rings of Saturn will require spacecraft systems with enormous propulsive capability. NASA is currently studying the critical technologies for just such a system, called Nuclear Electric Propulsion (NEP). Electric propulsion is the only technology which can effectively provide the required total impulse for this demanding mission. Furthermore, the power source must be nuclear because the solar energy reaching Saturn is only 1% of that at the Earth. An important aspect of this mission is the ability of the low thrust propulsion system to continuously boost the spacecraft above the ring plane as it spirals in toward Saturn, thus enabling scientific measurements of ring particles from only a few kilometers.

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