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Characterization of high-k gate dielectric and metal gate electrode semiconductor samples with a total reflection X-ray fluorescence spectrometer
Spectrochimica Acta Part B Atomic Spectroscopy
◽
10.1016/j.sab.2004.04.009
◽
2004
◽
Vol 59
(8)
◽
pp. 1227-1234
◽
Cited By ~ 11
Author(s):
Chris M. Sparks
◽
Meredith R. Beebe
◽
Joe Bennett
◽
Brendan Foran
◽
Carolyn Gondran
◽
...
Keyword(s):
Gate Dielectric
◽
Total Reflection
◽
Gate Electrode
◽
Metal Gate
◽
X Ray
◽
High K
◽
Fluorescence Spectrometer
◽
High K Gate Dielectric
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References
Voltage stress induced interface states and hole trapping in germanium pMOSFETs with high-k gate dielectric and metal-gate electrode
Materials Science in Semiconductor Processing
◽
10.1016/j.mssp.2020.105612
◽
2021
◽
Vol 124
◽
pp. 105612
Author(s):
Fu-Chien Chiu
◽
Wei-Chia Chen
◽
Jih-Huah Wu
◽
Kuei-Shu Chang-Liao
Keyword(s):
Gate Dielectric
◽
Interface States
◽
Gate Electrode
◽
Metal Gate
◽
Hole Trapping
◽
High K
◽
Voltage Stress
◽
High K Gate Dielectric
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Integration of HfxTayN Metal Gate Electrode with High-k Gate Dielectric in MOS Devices
ECS Transactions
◽
10.1149/1.2193872
◽
2019
◽
Vol 2
(1)
◽
pp. 41-48
Author(s):
Rosa María Luna-Sánchez
◽
Ignacio González-Martínez
Keyword(s):
Gate Dielectric
◽
Gate Electrode
◽
Metal Gate
◽
Mos Devices
◽
High K
◽
High K Gate Dielectric
Download Full-text
A carrier-mobility model for high-k gate-dielectric Ge MOSFETs with metal gate electrode
Microelectronics Reliability
◽
10.1016/j.microrel.2010.04.016
◽
2010
◽
Vol 50
(8)
◽
pp. 1081-1086
◽
Cited By ~ 2
Author(s):
J.P. Xu
◽
X. Xiao
◽
P.T. Lai
Keyword(s):
Carrier Mobility
◽
Gate Dielectric
◽
Mobility Model
◽
Gate Electrode
◽
Metal Gate
◽
High K
◽
High K Gate Dielectric
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Low temperature MOSFET technology with Schottky barrier source/drain, high-K gate dielectric and metal gate electrode
Solid-State Electronics
◽
10.1016/j.sse.2004.05.045
◽
2004
◽
Vol 48
(10-11)
◽
pp. 1987-1992
◽
Cited By ~ 28
Author(s):
Shiyang Zhu
◽
H.Y. Yu
◽
J.D. Chen
◽
S.J. Whang
◽
J.H. Chen
◽
...
Keyword(s):
Low Temperature
◽
Schottky Barrier
◽
Gate Dielectric
◽
Gate Electrode
◽
Metal Gate
◽
High K
◽
High K Gate Dielectric
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Integration of HfxTayN Metal Gate Electrode with High-k Gate Dielectric in MOS Devices
ECS Meeting Abstracts
◽
10.1149/ma2006-01/9/380
◽
2006
◽
Keyword(s):
Gate Dielectric
◽
Gate Electrode
◽
Metal Gate
◽
Mos Devices
◽
High K
◽
High K Gate Dielectric
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Characterization of GOI-MISFET with a High-k Gate Dielectric and Metal Gate Fabricated by New Graded Ge Condensation Method
Journal of the Korean Physical Society
◽
10.3938/jkps.51.1080
◽
2007
◽
Vol 51
(3)
◽
pp. 1080
Author(s):
Mungi Park
◽
Won Seok Choi
Keyword(s):
Gate Dielectric
◽
Metal Gate
◽
Condensation Method
◽
High K
◽
High K Gate Dielectric
Download Full-text
Characterization of high-k gate dielectric/silicon interfaces
Applied Surface Science
◽
10.1016/s0169-4332(01)00841-8
◽
2002
◽
Vol 190
(1-4)
◽
pp. 66-74
◽
Cited By ~ 107
Author(s):
Seiichi Miyazaki
Keyword(s):
Gate Dielectric
◽
High K
◽
High K Gate Dielectric
Download Full-text
CMOS Devices - Metal Gate & High-K Gate Dielectric
2007 IEEE International Electron Devices Meeting
◽
10.1109/iedm.2007.4418859
◽
2007
◽
Author(s):
Jong Shik Yoon
◽
Aaron Thean
Keyword(s):
Gate Dielectric
◽
Metal Gate
◽
High K
◽
High K Gate Dielectric
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Improvement of metal gate/high-k dielectric CMOSFETs characteristics by atomic layer etching of high-k gate dielectric
Solid-State Electronics
◽
10.1016/j.sse.2012.11.008
◽
2013
◽
Vol 82
◽
pp. 82-85
◽
Cited By ~ 4
Author(s):
K.S. Min
◽
C. Park
◽
C.Y. Kang
◽
C.S. Park
◽
B.J. Park
◽
...
Keyword(s):
Gate Dielectric
◽
Atomic Layer
◽
Metal Gate
◽
High K
◽
High K Dielectric
◽
Atomic Layer Etching
◽
High K Gate Dielectric
Download Full-text
Gate Dielectric Integrity along the Road Map of CMOS Scaling including Multi-Gate Fet, TiN Metal Gate, and HfSiON High-k Gate Dielectric
2006 IEEE International Reliability Physics Symposium Proceedings
◽
10.1109/relphy.2006.251309
◽
2006
◽
Author(s):
T. Pompl
◽
H. Mogul
◽
M. Kerber
◽
G. Haase
◽
E. Ogawa
◽
...
Keyword(s):
Gate Dielectric
◽
Metal Gate
◽
The Road
◽
Cmos Scaling
◽
Road Map
◽
High K
◽
Tin Metal
◽
High K Gate Dielectric
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