The comparison of the growth models of silicon nitride ultrathin films fabricated using atmospheric pressure plasma and radio frequency plasma

2007 ◽  
Vol 101 (2) ◽  
pp. 023513 ◽  
Author(s):  
Mari Nakae ◽  
Ryoma Hayakawa ◽  
Takeshi Yoshimura ◽  
Norifumi Fujimura ◽  
Shunsuke Kunugi ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Radio Frequency ◽  
Ultrathin Films ◽  
Atmospheric Pressure ◽  
Growth Models ◽  
Atmospheric Pressure Plasma ◽  
Radio Frequency Plasma ◽  
Pressure Plasma ◽  
Frequency Plasma

The Design of an Atmospheric Pressure Plasma Torch Used for Polishing Ultra-Smooth Surfaces

2007 ◽  
Vol 364-366 ◽  
pp. 340-345 ◽  
Author(s):  
Ju Fan Zhang ◽  
Bo Wang ◽  
Shen Dong
Keyword(s):  
Radio Frequency ◽  
Atmospheric Pressure ◽  
Plasma Torch ◽  
Large Scale ◽  
Atmospheric Pressure Plasma ◽  
Machining Process ◽  
Special Treatment ◽  
Pressure Plasma ◽  
Frequency Plasma ◽  
Part Surface

As there are always certain defects on the final surface of large-scale lightweight mirrors, which are formed in traditional mechanical polishing process, such as microcracks, lattice disturbances, plastic deformation, and so on, an atmospheric pressure plasma polishing method is a good solution to this problem. As a key component, the design of the capacitance coupling atmospheric pressure radio-frequency plasma torch is introduced. The designed torch uses water cooled coaxial aluminium electrodes with special treatment to avoid arcing between them. In normal machining process, the mixture of reaction gas and plasma gas with optimum ratio is input into the plasma torch. Then, excited by radio-frequency power, reaction gas is ionized in the plasma so as to create high density and energy reactive radicals under atmospheric pressure. The radicals cause chemical reactions with the atoms on the part surface, which performs an effective atomscale removal process. As the machining process is chemical in nature, this method avoids surface/subsurface defects mentioned above. Furthermore, initial experiment data analysis has proved that the atmospheric pressure plasma polishing method is effective and reliable, as well as demonstrates the validity of the designed plasma torch.

scholarly journals The dynamics of radio-frequency driven atmospheric pressure plasma jets

2009 ◽  
Vol 162 ◽  
pp. 012013 ◽  
Author(s):  
L Schaper ◽  
S Reuter ◽  
J Waskoenig ◽  
K Niemi ◽  
V Schulz-von der Gathen ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Plasma Jets ◽  
Pressure Plasma

scholarly journals Controlled production of atomic oxygen and nitrogen in a pulsed radio-frequency atmospheric-pressure plasma

2017 ◽  
Vol 50 (45) ◽  
pp. 455204 ◽  
Author(s):  
J Dedrick ◽  
S Schröter ◽  
K Niemi ◽  
A Wijaikhum ◽  
E Wagenaars ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Atmospheric Pressure ◽  
Atomic Oxygen ◽  
Atmospheric Pressure Plasma ◽  
Pressure Plasma

Hollow cathode and hybrid atmospheric plasma sources

2008 ◽  
Vol 80 (9) ◽  
pp. 1931-1937 ◽  
Author(s):  
Hana Baránková ◽  
Ladislav Bardos
Keyword(s):  
Radio Frequency ◽  
Hollow Cathode ◽  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Hollow Cathode Discharge ◽  
Atmospheric Plasma ◽  
Plasma Sources ◽  
Pressure Plasma ◽  
Hollow Electrode

Generation and features of the radio frequency (RF) hollow cathode discharge (HCD) are compared for the atmospheric and moderate pressures. The atmospheric-pressure plasma systems, fused hollow cathode (FHC) and hybrid hollow electrode-activated discharge (H-HEAD), are described. Examples of applications where both FHC and H-HEAD have already been employed are given, and potentials for new processes are discussed.

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