Effect of NaOH solution on surface textured ZnO: Al films prepared by pulsed direct current magnetron sputtering

Materials Science in Semiconductor Processing ◽

10.1016/j.mssp.2012.04.007 ◽

2012 ◽

Vol 15 (5) ◽

pp. 555-558 ◽

Author(s):

Ying Wang ◽

Hualin Wang ◽

Chaoqian Liu ◽

Yun Wang ◽

Shou Peng ◽

...

Keyword(s):

Magnetron Sputtering ◽

Direct Current ◽

Direct Current Magnetron Sputtering ◽

Naoh Solution ◽

Pulsed Direct Current

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A micro-electromechanical systems based vibration energy harvester with aluminum nitride piezoelectric thin film deposited by pulsed direct-current magnetron sputtering

Applied Energy ◽

10.1016/j.apenergy.2018.07.001 ◽

2018 ◽

Vol 228 ◽

pp. 881-890 ◽

Author(s):

Xianming He ◽

Quan Wen ◽

Zhuang Lu ◽

Zhengguo Shang ◽

Zhiyu Wen

Keyword(s):

Thin Film ◽

Aluminum Nitride ◽

Magnetron Sputtering ◽

Direct Current ◽

Energy Harvester ◽

Vibration Energy ◽

Vibration Energy Harvester ◽

Direct Current Magnetron Sputtering ◽

Piezoelectric Thin Film ◽

Pulsed Direct Current

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Residual stress control of Cu film deposited using a pulsed direct current magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2018.05.011 ◽

2018 ◽

Vol 660 ◽

pp. 601-605 ◽

Author(s):

Tae Hyung Kim ◽

Soo Jung Lee ◽

Do Han Kim ◽

Dong Woo Kim ◽

Jeong Woon Bae ◽

...

Keyword(s):

Residual Stress ◽

Magnetron Sputtering ◽

Direct Current ◽

Stress Control ◽

Cu Film ◽

Direct Current Magnetron Sputtering ◽

Pulsed Direct Current

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Effect of deposition power on structural and electrical properties of Al-doped ZnO films using pulsed direct-current magnetron sputtering with single cylindrical target

Materials Science in Semiconductor Processing ◽

10.1016/j.mssp.2010.12.013 ◽

2011 ◽

Vol 14 (1) ◽

pp. 23-27 ◽

Author(s):

Beom-Ki Shin ◽

Tae-Il Lee ◽

Jyoti Prakash Kar ◽

Min-Jung Lee ◽

Kang-Il Park ◽

...

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Direct Current ◽

Zno Films ◽

Deposition Power ◽

Structural And Electrical Properties ◽

Direct Current Magnetron Sputtering ◽

Cylindrical Target ◽

Doped Zno ◽

Pulsed Direct Current

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Fluorine-doped tin oxide films grown by pulsed direct current magnetron sputtering with an Sn target

Applied Optics ◽

10.1364/ao.50.00c106 ◽

2010 ◽

Vol 50 (9) ◽

pp. C106 ◽

Author(s):

Bo-Huei Liao ◽

Chien-Cheng Kuo ◽

Pin-Jen Chen ◽

Cheng-Chung Lee

Keyword(s):

Magnetron Sputtering ◽

Direct Current ◽

Tin Oxide ◽

Oxide Films ◽

Direct Current Magnetron Sputtering ◽

Pulsed Direct Current ◽

Tin Oxide Films

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The properties of TiN thin films deposited by pulsed direct current magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2008.01.001 ◽

2008 ◽

Vol 516 (21) ◽

pp. 7294-7298 ◽

Author(s):

Tung-Sheng Yeh ◽

Jenn-Ming Wu ◽

Long-Jang Hu

Keyword(s):

Magnetron Sputtering ◽

Direct Current ◽

Direct Current Magnetron Sputtering ◽

Tin Thin Films ◽

Pulsed Direct Current

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Microstructural evolution of thin film vanadium oxide prepared by pulsed-direct current magnetron sputtering

Journal of Applied Physics ◽

10.1063/1.4759255 ◽

2012 ◽

Vol 112 (9) ◽

pp. 093504 ◽

Author(s):

M. A. Motyka ◽

B. D. Gauntt ◽

M. W. Horn ◽

E. C. Dickey ◽

N. J. Podraza

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Vanadium Oxide ◽

Microstructural Evolution ◽

Direct Current ◽

Direct Current Magnetron Sputtering ◽

Pulsed Direct Current

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Effect of process conditions on the optoelectronic characteristics of ZnO:Mo thin films prepared by pulsed direct current magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2010.03.007 ◽

2010 ◽

Vol 518 (17) ◽

pp. 4928-4934 ◽

Author(s):

Y.C. Lin ◽

B.L. Wang ◽

W.T. Yen ◽

C.T. Ha ◽

Chris Peng

Keyword(s):

Magnetron Sputtering ◽

Direct Current ◽

Process Conditions ◽

Direct Current Magnetron Sputtering ◽

Pulsed Direct Current

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Surface textured molybdenum doped zinc oxide thin films prepared for thin film solar cells using pulsed direct current magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2011.03.014 ◽

2011 ◽

Vol 519 (16) ◽

pp. 5571-5576 ◽

Author(s):

Y.C. Lin ◽

B.L. Wang ◽

W.T. Yen ◽

C.H. Shen

Keyword(s):

Thin Film ◽

Solar Cells ◽

Magnetron Sputtering ◽

Direct Current ◽

Thin Film Solar Cells ◽

Oxide Thin Films ◽

Direct Current Magnetron Sputtering ◽

Pulsed Direct Current

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Development of Zirconium Thin Films by Pulsed Direct Current Magnetron Sputtering: Effect of Pulsed Parameters

International Journal on Design and Manufacturing Technologies ◽

10.18000/ijodam.70135 ◽

2014 ◽

Vol 8 (1) ◽

pp. 5-14 ◽

Author(s):

Akash Singh ◽

P Kuppusami ◽

R Thirumurugesan ◽

V Ganesan ◽

E Mohandas

Keyword(s):

Magnetron Sputtering ◽

Direct Current ◽

Direct Current Magnetron Sputtering ◽

Pulsed Direct Current

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Dielectric breakdown of alumina thin films produced by pulsed direct current magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2018.07.004 ◽

2018 ◽

Vol 662 ◽

pp. 145-154 ◽

Author(s):

Benjamin V.T. Hanby ◽

Bryan W. Stuart ◽

Colin Grant ◽

Jonathan Moffat ◽

Jonathan Blissett ◽

...

Keyword(s):

Magnetron Sputtering ◽

Direct Current ◽

Dielectric Breakdown ◽

Direct Current Magnetron Sputtering ◽

Pulsed Direct Current

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